(Almelo, the Netherlands) will launch its new 2830 ZT Wafer Analyzer at
SEMICON Japan 2008, 3-5 December. The 2830 ZT offers the ultimate capability
for simultaneous non-contact determination of layer thickness and composition.
Designed specifically for the industry, it provides manufacturers with a powerful
tool for achieving the tightest process monitoring throughout the entire production
With the new 2830 ZT wavelength dispersive X-ray fluorescence (WDXRF) instrument,
users benefit from highly accurate and precise determination of layer composition,
thickness, contamination, dopant levels and surface uniformity on wafers up
to 300 mm. It offers simultaneous measurement of up to 24 elements on stacks
of up to 16 layers.
A host of new features, including the 4kW SST-mAX tube with ZETA technology,
ensures that the system delivers and maintains fast and cost-effective multi-layer
analysis with unrivalled precision and maximum uptime. ZETA technology eliminates
X-ray tube aging, which greatly enhances operational efficiency and strongly
reduces the need for drift correction and recalibration. Productivity and instrument
uptime are significantly improved as a result. Furthermore, SST-mAX allows operation
at a high constant current of 160 mA, delivering the highest sensitivity for
exceptional light element performance.
The 2830 ZT is supplied with PANalytical’s advanced SuperQ software,
which includes the FP Multi. The intuitive user interface ensures that even
inexperienced operators can carry out fully automated fundamental parameter
analysis of multi-layers.
The 2830 ZT builds on the achievements of its predecessor the PW2830, which
broke new ground by becoming the first X-ray metrology system to comply with
all 300 mm standards. The 2830 ZT meets all current industry norms and standards
to provide fully automated, contamination-free wafer handling. With a small
footprint, excellent tool matching capabilities and various wafer loading options,
ranging from manual to automatic, the 2830 ZT integrates seamlessly into any
For detailed information on the 2830 ZT, visit PANalytical on booth #2A-203
at the world’s largest exposition of semiconductor equipment and materials.
In addition to the 2830 ZT launch, PANalytical’s full range of innovative
X-ray metrology solutions will be on display in Japan.
For more details of the PANalytical range of advanced metrology tools, visit: