Oxford
Instruments Plasma Technology (OIPT), a leading manufacturer of high technology
tools and systems, has recently received multiple orders with a total value
of over £3.5M for its advanced Plasmalab®System133 cluster tool. These
systems will be used for the deposition of Diamond Like Carbon (DLC) - a process
used in the manufacture of power devices.
DLC coatings have the right electrical resistivity to make high power semiconductors
work at ever higher voltages and OIPT was one of the first companies to prove
this process in 1995, successfully transferring the process from the laboratory
to large scale production. OIPT’s range of production tools offer excellent
uniformity, reproducibility and high-throughput processes, offering both single
wafer or cassette load wafer handling options with integrated process control,
making them ideally suited for this application.
The power semiconductor industry for automotive, industrial electronics, robotics
and process automation demands chips which can carry more power, with greater
reliability.
Mark Vosloo, Oxford Instruments Plasma Technology’s Sales Director comments,
‘Our many years of expertise in the DLC process based on our System133
cluster tool, ensures that we can meet demanding customer requirements. The
company’s proven process capability and reliable tailor made solutions,
for these and many other challenging processes and market applications, is the
reason we are the manufacturer of choice for these customers.’