FRT presents a new profilometer at this year's CONTROL 2009 in Stuttgart.
The optical profiler
has been optimized for the non-destructive measurement of surfaces. The MicroSpy
Profile measures roughness, contour, 3D topography, step height, planarity,
geometry, volume, bearing contact area and more with metrological precision.
The new optical profiler follows the MicroSpy Topo, an award-winning confocal
microscope which was introduced by FRT in 2008. As with all metrology tools
from the MicroSpy series, the new profilometer is easy to operate, budget-friendly
and powerful in its performance (up to 3 nanometers vertical resolution).
MicroSpy metrology tools are compact single-sensor tools with a high-precision
motorized x,y-stage and a CCD-camera for convenient sample positioning. Depending
on the system, the sensor is approached by means of a manual axis with coarse
and fine adjustment or a motorized z-axis.
FRT offers two sensor technologies in its MicroSpy measuring tools. The MicroSpy
Topo uses confocal microscopy, a "one-shot" measuring method. The
new optical profiler employs a line-scanning, non-contact chromatic point sensor
with LED light-source. FRT offers different point sensors with various measuring
ranges to enable a broad range of applications on surfaces from reflective to
absorbing, smooth to rough or even transparent. This enables the user to produce
results that are compliant with established metrology standards such as DIN,
ISO, SEMI, ASTM or JIS in 2D and 3D with micrometer and nanometer accuracy.
To find out more about FRT MicroSpy metrology tools and to see the new MicroSpy
Profile, visit FRT at this year's CONTROL 2009. (hall 7, booth 7232)