Surface Technology Systems
plc (STS), a leader in plasma process technologies for manufacturing MEMS
and advanced semiconductor devices, today announced that they have received
an order from Fraunhofer Institute for Silicon Technology ISIT for its market
leading Pegasus system. This 200mm system will be used in a variety of projects
within the research and development center for Microelectronics and Microsystems
Technology which ISIT represents, providing research and production in one location.
Fraunhofer ISIT, based in Itzehoe, Germany develops and manufactures components
in microelectronics and microsystems technology, from the design phase –
including system simulation – to prototyping and fabrication of samples,
up to series production for a wide range of applications such as medical care,
environmental and traffic engineering, communication systems, automotive industry,
and mechanical engineering. Working under contract, ISIT develops devices in
accordance with customer requirements including full system integration using
miniaturized assembly and interconnection technology. Together with Vishay Siliconix
Itzehoe GmbH, the institute operates a professional semiconductor production
line which is up-to-date in all required quality certifications (e. g. ISO 9001,
TS 16949). This line is used in parallel for PowerMOS and microsystem production
and for R&D projects developing new devices and technological processes.
“We deal with a large variety of customers, creating a high demand for
our deep silicon etch technology,” said Christian Schroeder of Fraunhofer
ISIT. “The Pegasus system from STS is by far the most flexible tool to
satisfy these varied and highly challenging specifications. In addition to process
flexibility, we also require high etch rates with good uniformity and profile
control for typical MEMS structures, and very fine CD control and smooth sidewalls
for semiconductor and TSV applications. We are convinced that the Pegasus system
delivers the best process capability available on the market place today”.
Eizo Yasui, CEO of STS replied, “Winning this order at a leading European
facility, with exposure to a large number of users, is important for us. We
are confident our Pegasus provides the ideal combination of flexibility and
market-leading process capabilities on a production-proven system, to enable
Fraunhofer ISIT and their clients to transfer their own innovations into new
business successes.”
Posted June 12th, 2009