Applied Materials,
Inc. today introduced its Applied SmartMove™ system, the semiconductor
industry's first comprehensive wafer management solution for non-automated
200mm and 300mm fabs. The SmartMove system brings new efficiency to these fabs,
seamlessly integrating with customers' existing MES* software to wirelessly
track and direct the movement of wafer lots. With the SmartMove system, users
can boost factory output by up to 10 percent, and typically realize a return on their
investment in less than 9 months.
The SmartMove system brings new efficiency to non-automated fabs, seamlessly integrating with existing MES software to wirelessly track and direct wafer movement. (Graphic: Business Wire)
“The SmartMove system can be a game-changer for customers with mature
fabs, delivering the key benefits of robotic handling systems at a fraction
of the cost,” said Manfred Kerschbaum, senior vice president of Applied
Global Services. “This end-to-end, non-robotic wafer management system
uniquely integrates world-class software, hardware and service into a single,
low-risk solution. The SmartMove system is a great example of our commitment
to helping customers unlock additional fab efficiency and maximize the value
of their existing assets in a very short time.”
The SmartMove system integrates Applied's production-proven Activity
Manager™ workflow automation software with LotTrack® technology from
Intellion AG, an innovative radio frequency and ultrasound-based wafer carrier
tracking system. Using SmartMove technology, a customer's MES is continuously
updated with the exact location of every wafer carrier. This location-aware
capability enables the MES to optimize operator efficiency by sending “attention
needed” and “where next” data to display panels on each carrier,
freeing operators from manual data entry, eliminating misplaced lots and reducing
cycle time.
Rapid deployment of the SmartMove system at a customer site is assured by non-intrusive
hardware and by pre-configured software that requires no MES code changes, eliminating
the risk of a production failure during deployment. Applied's experienced
factory automation engineers perform installation and testing, as well as provide
on-going technical support. The Activity Manager application is built on Applied's
common automation software architecture, enabling the easy integration of additional
software packages, such as the Applied Real-Time Dispatcher™ (RTD), for
even greater operational efficiency.
For more information on the SmartMove System, visit www.appliedmaterials.com/products/smartmove_2.html.