At Microscopy + Microanalysis show Carl
Zeiss presents a highly flexible NanoPatterning Engine for its CrossBeam®
(FIB/SEM) workstations. Being able to flexibly and precisely control the focused
ion beam-possibly in combination with process gases-is key in scientific and
industrial research and development.
Left: Perspective of the patterning beam.
Right: Corresponding SEM view image.
For productivity applications, reliability and ease of use are major factors
that determine the quality of the beam control interface. The new NanoPatterning
Engine Software addresses these requirements by providing a highly flexible
yet intuitive user interface enabling most complex and high- accuracy structuring
at 16 bit accuracy.
Key features of the Nano Patterning Engine include
- a “drawing program” style interface for the creation of complex
shapes, e.g. ellipses, rings, text etc.,
- vector-based patterning of shapes,
- 3D patterning based on grayscale bitmaps
- real-time visualization from the perspective of the patterning beam as
well as live SEM imaging of the patterning process.
For higher demands a software extension is available that provides additional
functionality such as patterning of voids and outlines, threshold milling and
Application examples comprise atom probe tip preparation, microstrainer, nano-optical
elements such as Fresnel-lenses and countless customer specific structures and