Surface Technology Systems
plc (STS), the market leader in deep silicon etching for the growing advanced
packaging and MEMS market, today announced that they have sold a Pegasus DRIE
system to Integrated Sensing Systems.
ISSYS was established in 1995 to design, develop, manufacture and commercialize
innovative products based on high performance MEMS. Nader Najafi, founder of
ISSYS stated, "As our technology has matured, we have succeeded in developing
micro devices for industrial, medical, and fuel cell applications. For many
years, STS silicon etch technology has been a key enabling process for our research
and development, and this Pegasus tool will provide us with the manufacturing
capability we now require as we ramp up production. The tool will also allow
us to offer high-volume manufacturing to our MEMS foundry customers."
Eizo Yasui, CEO of STS replied, "This order is yet another example of
how STS' long-term relationships with research groups and small start-ups can
enable a smooth transition to MEMS production when innovations developed in
the lab are eventually brought to market."