AIXTRON AG today announced an order for a Black Magic CNT system from the leading Spanish Institute, Centro Nacional de Microelectrónica (CNM), based in Barcelona, Spain. The order was received in the third quarter 2009 and the system will be delivered in the fourth quarter in the 4 inch wafer configuration. The system installation will be performed by the AIXTRON support team.
The Black Magic tool will be used to produce CNT for various devices in development including biosensors, gas sensors, NEMS, FET circuitry, AFM probes, energy harvesting devices, low resistivity interconnections/contacts and thermal management materials.
Dr. Philippe Godignon, Grupo de Aplicaciones Biomédicas (GAB), Centro de Investigación Nacional en Red en Bioingeniería, Biomateriales y Nanomedicina (CIBER-BBN), comments: “We are looking forward to our new Black Magic system. It was selected because it is ideal for a research centre such as CNM with a large range of activities and targeted applications. The AIXTRON tool offers excellent flexibility for all kinds of CNT growth on different substrates and devices. Its wide temperature range and plasma enhanced capabilities are adaptable not only to basic research but also to development work on more standard technologies.
The Black Magic tool will complete our micro-nanotechnology facilities installed in our 2,500 m2 clean room, alongside state-of-the-art equipment such as e-beam, FIB, AFMs, nanoimprints, and CVD furnaces as well as a full CMOS/VDMOS fabrication line which are currently used to develop next generation micro/nano devices in the fields of biomedicine, environment, food, security, energy and transportation applications.”