GmbH, Heidelberg, Germany, a leading supplier of direct write laser lithography
systems, announced order for two advanced VPG maskless lithography systems from
an Asian based photomask production group.
These systems will have a write area of up to 800 mm by 800 mm and will be
able to expose structures down to 1.0 µm, with an address grid of 50 nm.
“During the second half of 2009 we have seen a clear pick up in demand
for production tools within the industry. We are very pleased that another leading
Asian based photomask production firm has chosen the VPG system for its superior
technology, throughput, along with its excellent reliability and quality.”
states Alexander Forozan, Head of Global Sales and Business Development
About Heidelberg Instruments, GmbH: With an installation base in over 30 countries,
Heidelberg Instruments is a world leader in production of high precision maskless
lithography systems. These systems are used for direct writing and photomask
production by some of the most prestigious universities and industry leaders
in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays,
Micro Optics, and many other related applications.