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Posted in | MEMS - NEMS | Nanoanalysis

Bosch Choose Zeta Instruments 3D Metrology Solution for Development of PV and MEMS

Published on October 18, 2010 at 6:49 PM

Zeta Instruments, Inc. a leading provider of cost-effective, precision measurement solutions for micron-scale surface analysis, announced that Bosch has selected the Zeta-200 optical metrology system to support advanced research and development activity at its "Corporate Sector Research and Advance Engineering" (Corporate Research) facility in Stuttgart, Germany.

The leading global supplier of technology and services chose Zeta's 3D surface imaging and metrology solution to meet the rigorous measurement requirements associated with a range of Bosch R&D activities, including photovoltaics and MEMS (Micro-Electro-Mechanical-Systems) advancement.

The Zeta-200 microscope system leverages Zeta's patented Z-Dot technology to provide rapid 3D imaging of deep, high-aspect ratio features, enabling the gathering of step height, roughness, dimensions, angles and volume, all without contacting or damaging the sample. Due to its non-destructive measurement capability, users are able to quickly characterize very high aspect ratio features, accelerating product development for fluid micro-channel fabrication. It also permits the imaging of complex, non-flat surfaces that have very high roughness and/or low reflectivity-especially aiding solar cell research by making it possible to inspect surfaces that are both rough and reflect very little light.

With Z-Dot technology optical imaging systems are able to quickly map micron-scale surface features in three dimensions. In under a minute, the Zeta-200 vertically scans a surface in increments as small as 15 nanometers to provide accurate measurements of samples on the Z as well as on the X and Y-axes. Most measurement systems have difficulty measuring these surfaces, or require complex sample alignment and preparation to do so. The Zeta-200 is an easy-to-use optical measurement tool that requires less training and maintenance than alternatives-providing faster implementation and better value over competing tools.

"With the Zeta-200 we are able to quickly and reliably measure our solar cell and MEMS structures, bringing greater efficiencies and lower costs to fabrication processes," stated, Dr. Thomas Wagner, Corporate Research Silicon Solar Cells at Bosch. "We evaluated numerous metrology options and chose the Zeta-200 hands down; it enables our research teams to stay at the forefront of their fields by providing mission-critical metrology feedback in a timely and cost-effective manner."

Coupled with application-specific software, the Zeta-200 provides imaging and measurement capabilities superior to those of laser confocal microscopes. In addition, Zeta offers true-color imaging, lowers system cost and provides a simpler overall design for lower maintenance and greater ease of use. Other solutions such as interferometer-based microscope systems require meticulous sample alignment and have difficulty or are unable to effectively measure deep-feature samples such as those used in MEMS, while Scanning Electron Microscopes (SEMs) provide very high-resolution imaging but require lengthy, often destructive, sample preparation and cannot provide true-color images.

Rusmin Kudinar, president of Zeta Instruments noted, "Z-Dot technology provides precision measurement advantages for an array of difficult-to-measure surfaces and is ideally-suited to benefit solar cell and biotechnology applications. We are delighted that Bosch has found our solution to be best in class and honored to supply this critical component of their metrology process."

Zeta Instruments systems are unique in offering multi-function metrology features within a single integrated measurement tool. The Zeta-200 has options for a film thickness photo-spectrometer, Nomarski/q-DIC low-contrast imaging optics, and various sample handling configurations. These options enable users to measure transparent thin-films on samples such as anti-reflective coatings, photo-resists and ultra-smooth surfaces with nanometer-scale features, as well as to measure samples in multiple physical orientations.

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