Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer
Deposition (ALD) systems, has launched production of novel, innovative plasma
enhanced ALD (PEALD) systems based on highly advanced, customer-proven
"ion-free" remote plasma source.
Various excited species such as oxygen, nitrogen and hydrogen radicals with
zero charge can be generated to broaden the range of ALD process chemistries -
especially metal and metal nitride thin films can be deposited at low
temperatures with activated species - and the remote source enables processing
of even fragile substrates and delicate device structures without plasma damage
due to very low ion count but still high reactive species flux.
The novel Picoplasma source system (*) can be mounted on existing SUNALE ALD
reactors or the whole PEALD system can be installed as one compact, small
footprint deposition unit of easy implementation, quick maintenance and low cost
of ownership. The system can also be fully automated by integrating it into the
Picoplatform cluster tool with cassette-to-cassette loading via a vacuum load
lock. Fast matching and stable power delivery of the plasma unit enable high
yields with fast process speed and excellent film uniformity (thickness STD 1.3
% with Al2O3 on silicon, deposited from TMA and oxygen radicals) and
conformality in deep trenches up to AR of 48:1. In short, the novel Picosplasma
tool increases the already top level versatility, customizability and
upscalability of Picosun's existing ALD systems.
ALD was invented by Picosun Board Member Dr. Tuomo Suntola in Finland in the
early seventies. Picosun Oy is a Finnish, globally operating manufacturer of
state-of-the-art ALD systems for micro- and nanotechnology applications,
representing continuity to over three decades of ALD reactor design. Picosun's
SUNALE ALD process tools are used by high profile industries and top research
organizations across four continents and the company has redistributors in ca.
30 countries. Picosun Oy is based in Espoo, its manufacturing facilities are
located in Kirkkonummi and U.S. headquarters in Detroit, Michigan. Picosun Oy is
a part of Stephen Industries Inc Oy.
Multiple patents pending