Posted in | Nanoelectronics

Heidelberg Instruments Uses CU Technique to Further Shrink Nano-Scale Devices

Published on July 11, 2011 at 3:49 AM

By Cameron Chai

University of Colorado and Heidelberg Instruments have signed an option agreement for developing a CU nanotechnology that reduces the size of circuitry in nano-based devices, allowing fabrication of miniature computer chips and other nano-scale devices.

The CU-Boulder research team that developed the technique includes Christopher Bowman, Robert McLeod, and Tim Scott. Christopher Bowman is a professor of biological and chemical engineering whereas Robert McLeod is an associate professor of energy, computer, and electric engineering. Tim Scott is a visiting professor of biological chemical, and mechanical engineering.

To manufacture a small-sized circuitry, the research team used a nanolithography technique that has a pending patent to record dots and lines with highly-focused blue light beams on a substrate of silicon. The recorded lines and dots were several times smaller than a human hair width. This is a basic step done in any nanoengineering technique, but the CU nanotechnology-based solution removes the pattern edges by utilizing a second ray of UV light beams. This technology enables the production of tiny structures and helps in decreasing the size of solar cells and computer chips.


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