Dalian Institute of Chemical Physics Purchases Heidelberg Table Top Maskless Aligner System

Published on February 7, 2013 at 6:59 AM

Heidelberg Instruments announced the sale of a µPG 501 table top maskless aligner system to the Dalian Institute of Chemical Physics, Dalian, China. 

Designed with the focus on high performance at an affordable price, the μPG 501 maskless aligner system is an ideal solution for prototyping various devices such as MEMS, integrated Optics, microfluids, Lab-on-a-Chip, as well as other advanced fabrication research. The system has the ability to write structures down to1μm at a fast speed, replacing the traditional mask aligner systems. With a footprint of only 60 x 75 cm² the μPG 501 comes with a wide range of capabilities.  Dalian Institute of Chemical Physics will use the maskless aligner system for advanced research in semiconductor-based materials for photocatalysis and photovotaic cells.

Source: http://www.himt.de/

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