Entegris and SEMI Partner to Discuss Nanodefectivity in Semiconductor Manufacturing at SEMICON West 2013

Published on June 28, 2013 at 6:10 AM

Entegris, Inc. and SEMI® are collaborating to organize a breakfast forum and panel discussion on achieving "Defect Reduction in the Sub-20 nm Era" for semiconductor manufacturing at the upcoming SEMICON West 2013 tradeshow. The forum will be held on Thursday, July 11, 2013 from 7:30 am to 10 am at the San Francisco Marriott Marquis in San Francisco, California.

As the semiconductor industry ramps the manufacturing of advanced semiconductor devices at the sub-20 nm node, it is facing a number of challenges including skyrocketing capital requirements, the adoption of difficult process technologies such as double patterning and Finfet structure, and an ever-increasing number of process steps. Yield is not only a challenge, but a key lever to the overall semiconductor business model. The Entegris-sponsored forum will explore the key yield challenges and defect reduction approaches at sub-20 nm nodes from three points of view — equipment, process and materials.

The event will feature a keynote presentation from Tim Hendry, Vice President, Technology and Manufacturing Group, Director Fab Materials at Intel Corporation. Following the keynote, there will be presentations on the topic of yield enhancement by leading equipment and materials companies including KLA-Tencor, Lam Research, ATMI, and Entegris. The event will conclude with an interactive panel discussion with the presenters.

To register for the Yield Forum, please go to: http://entegrisyield.eventbrite.com. Stay connected with the latest event announcements by following the Twitter hashtag #YieldForum.

In addition to the Yield Forum, Entegris is also scheduled to participate in the following SEMICON West events:

  • Addressing Nanodefectivity on Wednesday, July 10, 2013 at North Hall, Moscone Center. Jennifer Braggin, Senior Manager of Technical Marketing at Entegris will present at 10:30 am.
  • A Promising but Challenging Future on Wednesday, July 10, 2013 at Keynote Stage, Esplanade Hall. Bertrand Loy, Entegris President and CEO will join four other industry leaders on an executive panel at 2:00 pm.
  • SEMICON West 450 mm Transition Forum on Thursday, July 11, 2013 at South Hall, Moscone Center. Entegris will have a selection of its industry-leading 450 mm wafer handling solutions on display at 10:30 am.

To learn more about the events listed, please email: yield_forum@entegris.com. For more information about SEMICON West 2013, please visit http://www.semiconwest.org.

Source: http://www.entegris.com/

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