Advanced Diamond Technologies Receives Phase I SBIR from NSF for Diamond Starter Wafers

Advanced Diamond Technologies (ADT) is pleased to announce the award of a Phase I Small Business Innovation Research (SBIR) grant from the National Science Foundation (NSF) for the development of “Starter Wafers for Diamond MEMS Fabrication.”

“This project allows us to further expand the UNCD DOI (diamond on insulator) product line by demonstrating the integration of other common MEMS materials such as metals, nitrides, and complex oxides with UNCD. We will show that diamond wafers with outstanding uniformity can be manufactured in sizes up to 200 mm and meet MEMS foundry standards for cleanliness and reproducibility,” said ADT chief technical officer Dr. John Carlisle.