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JEOL USA Completes “Super” Microprobe Installation at NIST

Published on August 6, 2007 at 1:24 PM

JEOL USA, a leading supplier of electron microscopes and scientific instruments for nanotechnology, announced today that it has completed installation and acceptance of its first thermal field emission electron microprobe in the United States. The microprobe was installed at NIST in Gaithersburg, Maryland, in one of the world’s most technically advanced laboratories for developing new technologies and standards for a wide range of nanotechnology fields.

The JEOL JXA-8500F electron microscope

A fully-automated, high-throughput versatile electron probe microanalyzer (EPMA), the JEOL JXA-8500F is a unique type of electron microscope with analytical ability that surpasses that of even the most advanced scanning electron microscopes (SEM) available today. While most manufacturers and researchers choose the SEM, the EPMA has more of a niche market for customers requiring the ultimate quantitative results and data acquisition.

The ability to simultaneously utilize an energy dispersive x-ray spectrometer (EDS) and up to five wavelength dispersive x-ray spectrometers (WDS) increases speed for elemental analysis of nanometric sample areas. All but a few of the elements on the periodic table can be analyzed. As a result, this “super” microprobe is ideal for the materials, geological, and petrological fields.

The JXA-8500F is the only EPMA to use a Schottky-type field emission gun. The probe diameter is 1/10th the size of conventional probes.

“This new FE gun allows us to analyze extremely small features by operating at low kV and high beam currents,” Charles Nielsen, vice president of JEOL USA, Inc. “The analytical ability of this instrument makes it possible to measure features and map them with a resolution approaching one hundred nanometers.”

The analytical ability of the microprobe comes at a higher price than the SEM, Nielsen adds, noting that the price is about 20% higher than conventional EPMA. JEOL, with headquarters in Akashima, Japan, is the market leader in sales of microprobes.

The JXA-8500F utilizes X-ray spectrometry and allows for high speed, high accuracy qualitative and quantitative in-depth surface analysis as well as area analysis.

JEOL's Surface Analysis product line is comprised of three categories: Auger Microanalyzers, Electron Probe Microanalyzers (EPMA), and Photoelectron Spectrometers.

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