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Beneq Increases Thin Film Coating Capabilities as it Acquires Atomic Layer Deposition Business

Published on December 13, 2007 at 2:19 PM

Beneq and Planar Systems have entered into an agreement where Beneq has acquired the Finnish based ALD Equipment and Coating service business from Planar.

Planar has had a remarkable depth of experience with ALD (Atomic Layer Deposition) which has made it a leader in industrial applications of ALD. Planar has used ALD in-house since its inception. Based on the extensive cumulated production know-how, it has designed and built over 50 ALD tools, for both production and advanced R&D. In addition to its own display manufacturing, Planar has been offering ALD equipment and services for unique new thin film applications through a dedicated ALD business team.

The acquisition comprises of the team of professionals with necessary assets needed for continuing the coating service and equipment business. As part of the agreement Planar grants also Beneq a license to its patents in the area of ALD. After the merger, Beneq will continue to serve both Beneq's and Planar's existing and new customers by providing both ALD equipment and coating services needed for concept verification purposes with strengthened capabilities and resources. This acquisition will make Beneq a world-leading company to address the need for precise, highly-conformal atomic level deposition of thin film materials beyond IC and semiconductor industry.

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