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Posted in | Nanofabrication

AIXTRON Announces Order from SuperNova for a Close Coupled Showerhead CRIUS Epitaxy Reactor

Published on April 17, 2008 at 1:17 PM

AIXTRON AG is pleased to announce an order from SuperNova for a Close Coupled Showerhead CRIUS epitaxy reactor.

SuperNova, located in Taoyuan, Taiwan, will receive the Close Coupled Showerhead CRIUS system in the 31x2-in wafer configuration. The reactor has been ordered for the development and manufacture of GaN based high brightness LEDs.

SuperNova has achieved an outstanding reputation for the extremely high brightness of its LEDs. Chairman Mr. Chun-Tsao Huang comments: “Our success in UHB LEDs has been built on the quality and performance of our MOCVD reactors. SuperNova was one of the first users of the Close Coupled Showerhead technology in Taiwan and this additional tool will feature prominently in our expansion program. AIXTRON has given us unrivalled technical and process support so we look forward to a smooth and quick production ramp up. We will work very closely together with the AIXTRON-team which will result in our strategic expansion proceeding on schedule.”

Taiwan is one of AIXTRON’s most important markets with over two dozen clients most with multiple tools.

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