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Heidelberg Instruments to Support Nanotechnology Research at University of Canterbury

Published on October 23, 2008 at 8:19 PM

Heidelberg Instruments announced the sale of a uPG101 table top maskless laser patterning system to the MacDiarmid Institute of the University of Canterbury, New Zealand.

The µPG101 is an extremely economical and easy to use Micro Pattern Generator for direct write applications as well as low volume mask making. It is also perfectly suitable for rapid prototyping of 2D and 3D microstructures on substrates up to 4 inches by 4 inches, and is capable of exposing high resolution features with an address grid of 100nm.

"The µPG101 system installed at the University of Canterbury will be used to support the research of New Zealand's MacDiarmid Institute for Advanced Materials and Nanotechnology. It is an ideal mask-making and device-prototyping tool to support the wide range of research being carried out, from exploring new applications for microfluidic systems, to developing optoelectronic and spintronic devices from a range of different organic and inorganic materials," states Professor Richard Blaikie, Deputy Director at the MacDiarmid Institute.

The µPG101 maskless lithography system offers a very small footprint of 60cm by 60cm. It presents a highly flexible, out of the box tool which is capable of layer to layer alignment through its integrated camera system. Applications include MEMS, BioMEMS, Integrated Optics, Micro Fluidics, µTAS, or similar areas requiring microstructures.

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