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Heidelberg Instruments to Support Researches in BIOMEMS at Chulalongkorn University

Published on October 23, 2008 at 9:09 PM

Heidelberg Instruments announced the sale of a µPG101 table top maskless laser patterning system to the Department of Chemical Engineering at the Chulalongkorn University, Thailand. This tool will be used for various researches in the BIOMEMS area.

The µPG101 is an extremely economical and easy to use Micro Pattern Generator for direct write applications as well as low volume mask making. It is also perfectly suitable for rapid prototyping of 2D and 3D microstructures on substrates up to 4 inches by 4 inches, and is capable of exposing high resolution features with an address grid of 100nm.

The µPG101 maskless lithography system offers a very small footprint of 60cm by 60cm. It presents a highly flexible, out of the box tool which is capable of layer to layer alignment through its integrated camera system.

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