announced the sale of a µPG101 table top maskless laser patterning system
to the Department of Chemical Engineering at the Chulalongkorn University, Thailand.
This tool will be used for various researches in the BIOMEMS area.
The µPG101 is an extremely economical and easy to use Micro Pattern Generator
for direct write applications as well as low volume mask making. It is also
perfectly suitable for rapid prototyping of 2D and 3D microstructures on substrates
up to 4 inches by 4 inches, and is capable of exposing high resolution features
with an address grid of 100nm.
The µPG101 maskless lithography system offers a very small footprint
of 60cm by 60cm. It presents a highly flexible, out of the box tool which is
capable of layer to layer alignment through its integrated camera system.