SUSS MicroTec Test Systems
(FWB:SMH)(GER:SMH), the premier supplier of wafer-level test solutions for semiconductor
devices, today announced the iVista(TM) LC High-Resolution Digital Microscope.
Its introduction is timed to meet the increasing need in failure-analysis labs
for an advanced microscopy tool capable of delivering high-resolution digital
images in conjunction with laser-cutting capabilities.
The iVista LC Digital Microscope significantly improves the productivity of
operators and engineers by providing a powerful microscopy solution. The unique
design of the iVista microscope delivers images with resolution comparable to
a 16-megapixel, color CCD. This means that even the tiniest features are quickly
and easily identifiable, and unlimited digital zooming provides more detail
and not just a pixilated image.
To meet the needs of engineers working in failure-analysis labs, a standard
laser port is available to mount laser cutters from all major manufacturers.
A high-precision, automated objective changer allows the engineer to switch
from a magnification used for navigation to a higher magnification for closer
inspection and laser cutting. The iVista LC Microscope also includes an optional
polarizer/analyzer unit for liquid-crystal thermography applications and enhanced
image contrast. For documentation tasks, the user can save the full-resolution
image and the multi-view screen.
Several additional software features in the SPECTRUM™ Vision System are
enabled when using the iVista LC Microscope in conjunction with an automated
probe system from SUSS MicroTec. Multi-view allows the user to create several
freely-defined regions that are magnified and displayed alongside the main view,
enabling live observation of specified areas without losing the “big picture”.
Multi-cam imaging displays a live image from a separate camera alongside the
live image from the iVista LC Microscope. The user can then, for example, monitor
contact height with the view from the patented ContactView™ system while
observing the position of the wafer and probe tips, eliminating expensive probe-card
crashes. Accurate point-to-point measurement and navigation tools using standard
objectives are also provided.
“The iVista LC Microscope delivers exactly the tools needed for wafer-level
failure analysis.” said Rob Carter, Vice President of Sales and Marketing
for SUSS MicroTec Test Systems. “The high-resolution optics along with
state-of-the-art digital zooming provide image detail well beyond any similar
product. Engineers involved in failure-analysis and design-debug tasks will
appreciate the advanced capabilities of the iVista LC, and managers will appreciate
the benefits from the productivity gains that can be realized with such a powerful
The iVista LC Microscope is available for immediate order, and the first units
are planned to be shipped in the first quarter of 2009. The system can also
be used with a manual probe station or as a stand-alone microscope.