Principles and Applications of NanoMEMS Physics

The field of Nanotechnology, which aims at exploiting advances in the fabrication and controlled manipulation of nanoscale objects, is attracting worldwide attention. This attention is predicated upon the fact that obtaining early supremacy in this field of miniaturization may well be the key to dominating the world economy of the 21st century, and beyond. NanoMEMS exploits the convergence between nanotechnology and microelectromechanical systems (MEMS) brought about by advances in the ability to fabricate nanometer-scale electronic and mechanical device structures. In this context, NanoMEMS-based applications will be predicated upon a multitude of physical phenomena, e.g., electrical, optical, mechanical, magnetic, fluidic, quantum effects and mixed domain.