manufactures following products for nano manufacturing:
Direct drive actuators with piezo motors
Motorized linear actuators with micrometer grade...
A torque motor is only one element in a complete rotary stage. This article describes the various parts of a toque motor and how they work, as well as their importance in the construction of a rotary...
http://www.azonano.com/article.aspx?ArticleID=2530 | 4 Mar 2010
The RotoRing300TM direct drive rotary table from IntelLiDrives adapts linear motor technology, coupled with air bearings, to provide faster and more accurate handling of the 300 mm semiconductor...
http://www.azonano.com/article.aspx?ArticleID=2528 | 1 Mar 2010
IntelLiDrives Air bearing Planar XY table reconciles the contradiction of precision and speed with a simple and cost-effective solution. They utilize planar linear motor technology and are true direct...
http://www.azonano.com/article.aspx?ArticleID=2529 | 4 Mar 2010