k-Space specializes in in-situ, real-time thin-film process monitoring tools. Since 1992 we have been developing quality integrated systems engineered to customer input and feedback. Our suite of...
The kSA MOS Ultra-Scan is a flexible, high-resolution scanning curvature and stress measurement system. Based on proven kSA MOS technology, this fully integrated ex-situ tool maps the curvature of...
http://www.azonano.com/article.aspx?ArticleID=1498 | 8 Feb 2006
The kSA MOS Ultra-Scan is a flexible, high-resolution scanning curvature and tilt measurement system suited to the analysis of semiconductor wafers and high performance optical coatings.
http://www.azonano.com/article.aspx?ArticleID=1499 | 9 Feb 2006
The kSA BandiT is a non-contact, non-invasive, real-time, absolute wafer temperature sensor. Using the temperature-dependent optical absorption edge of semiconductor materials, the kSA BandiT provides...
http://www.azonano.com/article.aspx?ArticleID=1492 | 8 Feb 2006