2403 SIDNEY STREET SUITE 300
PH: 1 (412) 381 3195
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XACTIX, Inc. develops and produces equipment for manufacturing micro electromechanical systems (MEMS).
Manufacturing MEMS devices requires adding new manufacturing steps to the standard IC process. These new steps require new, specialized equipment to maximize yield and productivity. XACTIX leverages its unique combination of expertise in instrument and equipment design, semiconductor materials processing, micro machining and fabrication, and MEMS manufacturing to design and build leading-edge MEMS process equipment.
XACTIX is the manufacturer of the Xetch® xenon difluoride (XeF2) etching systems, the X3 Series™ for commercial customers and the e1 Series™ for university customers and the newly introduced X3M and XT series.
These dry isotropic etching tools are popular in the MEMS community due to high selectivity to silicon versus many standard films including photoresist, silicon dioxide, silicon nitride, and aluminum. The Xetch® systems are particularly well suited for release, but are certainly not limited to MEMS applications and are useful for many applications where highly selective isotropic silicon etching is required. For more information on the unique advantages of xenon difluoride etching, please look at our Unique Capabilities of Xenon Difluoride for Releasing MEMS brochure.