The Microfabrication Laboratory (MFL) supports graduate and undergraduate education by providing access to microfabrication technology. The laboratory conducts microfabrication-related research, primarily in the area of microelectromechanical systems (MEMS). In MEMS, the laboratory's areas of expertise include surface micromachining, with an emphasis on metal surface micromachining using the Northeastern University MEtal Micromachining (NUMEM) process and bulk micromachining including anisotropic etching and alloy bonding.
Our facility includes a two thousand square foot cleanroom and ancillary space in the Dana Research Building and 3500 square feet of class 100/1000/support space in the Egan Research Center. Three faculty are currently direct contributors to its programs. The laboratory supports an engineer, a technician and about ten graduate students on average. Our mission is to investigate and apply methods and processes that support the fabrication of devices with specific commercial applications in mind and to train students in processes and procedures that are encountered in industry. As such, the MFL receives more than half its funding from industrial contracts for specific devices.