TEA Systems Corporation
65 Schlossburg St.
PH: 1 (610) 682 4146
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TEA Systems provides advanced process control, characterization and tuning software for semiconductor lithography in a unified framework for exposure tools, metrology and control of the process. TEA Systems products use metrology data from any source to model the parameters critical for successful wavefront engineering. All products are object oriented, supporting advanced contour, 3D, XY plotting, and user-defined model analysis with mouse interactive functions. Extensive tools are provided for automated and mouse-interactive data culling.