Surrey Nanosystems
Unit 24 Euro Business Park
New Road
Newhaven, BN9 0DQ
United Kingdom
PH: 44 (1273) 515899
Fax: 44 (1273) 512311
Email: sales@surreynanosystems.com
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Primary Activity
Carbon nanotube processing equipment
Company Background
Surrey
NanoSystems produces the world's most advanced tools and
Carbon Nanotube
processing recipes - making precision, repeatable nanotube and nanowire
fabrication a reality. Surrey NanoSystems
designed-for-purpose tools bridge the
gap between R&D initiatives, and the volume production of
commercial
nanotechnology-based products.
The NanoGrowth™
system, containing intellectual world-leading property developed over
many
years at The University of Surrey's Advanced Technology Institute
(ATI), and by
the thin-film tool maker CEVP, provides a versatile and proven platform
for
nanoengineering research, development and production. This includes a
pioneering technique for the precision growth of Carbon Nanotubes at
temperatures compatible with semiconductor fabrication processes.
The NanoGrowth
platform provides:
- highly-programmable CVD,
PECVD
and ICP processing
- proven material growth
recipes
including unique lower-temperature processes
- modular
and scalable hardware,
from a benchtop furnace, to a load/lock system with built-in catalyst
source
- common software control
throughout the range of tools
Surrey
NanoSystems will configure and build the turnkey process
equipment you need
to support your nanoengineering and thin film programs.
Surrey
NanoSystems' products and services
- Tools for carbon nanotube and
nanowire fabrication
- PVD/PECVD sputtering tools for
semiconductor, MEMS, GMR fabrication
- RF
power switches and accessories