Optical Profilers, 3D Imaging and Surface Metrology
Zeta Instruments manufactures high-performance, non-contact, 3D optical profilers that can analyze high-roughness, low-reflectance surfaces for solar cell, LED, and other nano and micro-scale manufacturing test applications. Based on our multi-mode optics approach, our ZDot™ profilers can accurately resolve 13nm z-heights. Our ZFT (film thicknesses spectrometer) add-on enables thin film measurements down to 30nm. Other channels such as the ZIC (Interference Contrast), ZSI (Shearing Interferometer) and ZX5 (Scanning Interferometer) can be added to the system, providing a complete optical metrology toolset in one compact platform. The Zeta3D imaging software rapidly acquires and processes the data (typically in 30 seconds) to produce true-color 3D feature maps. With other available options such as Through Transmisssive Imaging, Dark Field Imaging, Diamond Scribe and Automated Defect Inspection, our systems provide the widest range, highest flexibility and best value for most metrology applications.
Zeta Instrument's system designs are based on decades of experience in metrology and measurement systems, with a team that brings together industry veterans from a wide background in precision instrumentation, metrology, optics, semiconductors, mechanical engineering and system software. Our combination of expertise is what forms the basis of our leading-edge 3D metrology and imaging systems, as well as our commitment to innovative products and customer satisfaction