Ultraviolet Microscopy of Patterned Semiconductors

CRAIC Technologies is the worlds leading developer of UV-visible-NIR range scientific instruments for microanalysis. These include the QDI series UV-visible-NIR microspectrophotometer instruments designed to help you non-destructively measure the optical properties of microscopic samples. CRAIC's UVM series microscopes cover the UV, visible and NIR range and help you analyze with sub-micron resolutions far beyond the visible range. CRAIC Technologies also has the CTR series Raman microspectrometer for non-destructive analysis of microscopic samples. And don't forget that CRAIC proudly backs our microspectrometer and microscope products with unmatched service and support.

Ultraviolet Microscopy of Patterned Semiconductors

CRAIC Technologies has developed a broad spectral range microscope, the UVM-1 Ultraviolet Microscope.  This unique microscope is designed for high resolution imaging throughout the ultraviolet, visible and near infrared spectral regions.  Due to the flexibility of its design, this system is able to imaging from individual wavelengths to broad spectral ranges.  These ranges can selected and easily changed by the user.

One of the first applications of this system was to image small scale semiconductor circuits.  Below is an image of an area of a patterned wafer that is being imaged in the wavelength range of 279 to 367 nm (FWHM) with specular incident illumination.  This allows the operator to image extremely fine detail and to study otherwise colorless materials that absorb in the UV region.

Patterned wafer

Patterned wafer

Primary author: Dr. Paul Martin
Source: Ultraviolet Microscopy of Patterned Semiconductors by CRAIC Technologies.

This information has been sourced, reviewed and adapted from materials provided by CRAIC Technologies.

For more information on this source, please visit CRAIC Technologies.


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