Nanometric Metrology of Biomedical and Biotechnology MEMS Devices

BioMEMS is used for applying microdevices to medical and biological issues. Technologies in the BioMEMS sector utilize the advancements in micromachining and microfabrication to generate cheaper, faster, nano and microscale laboratories, namely microfluidics. The BioMEMS units provide support for personalized drug therapies and artificial organs, in addition to providing new methods to visualize cell communication.

Types of BioMEMS

BioMEMS can be categorized into two main types, namely:

  • biotechnology MEMS and
  • biomedical MEMS

Biotechnology MEMS deals in vitro with the host’s biological samples. Pathogen detection/ID, pharmacogenomics, drug discover, functional genomics, and gene sequencing are some examples.

  • Biomedical MEMS deals in vivo with the host anatomy and the body. Examples include biomedical MEMS include biosensors, drug delivery, and biotelemetry.

BioMEMS in Drug Delivery Systems

A huge amount of BioMEMS research is currently taking place in drug delivery systems, by utilizing microfabrication procedures. In this sector, two main categories, namely microparticles and micromachined nanopore membranes, have been envisioned. Microparticles, unlike the traditional particulate drug delivery systems, can be small-sized planar discs and have a diameter and thickness of 1ìm. Nanopore membranes are manufactured by selective etching, thin film depositions, and photolithography to generate silicon membranes. These membranes have uniform pores at the nanometer scale.


Other interesting developments in this sector such as micropumps, sensors, and microneedles are all aimed at swift drug delivery. The expanding BioMEMS sector has driven the need for an increase in nanometric metrology. Taylor Hobson is highly familiar with the nanometric metrology arena.

Taylor Hobson

Taylor Hobson is an ultra-precision technology company operating at the highest levels of accuracy within the field of surface and form metrology. They provide contact and non-contact measurement solutions to the most demanding applications on a global basis, with a worldwide infrastructure to support our clients, wherever they may be.

This information has been sourced, reviewed and adapted from materials provided by Taylor Hobson.

For more information on this source, please visit Taylor Hobson.


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