Piezo Nanopositioners for Manufacturing and R&D

Table of Contents

Introduction
QNP-L Piezo Nanopositioners
QNP-XY Piezo Nanopositioners
QNP-Z Piezo Nanopositioners
QNPHD Piezo Nanopositioners
QNP2 Two-Axis, Parallel Kinematic, XY Piezo Nanopositioners
QNP3 Three-Axis, Parallel Kinematic, XYZ Piezo Nanopositioners
Microscope-Objective Piezo Nanopositioners
     QFOCUS QF1
     QFOCUS QF-46
     QFOCUS QF-50
Ensemble QDe Networked Desktop Piezo Drive
Ensemble QL/QLe Networked Panel-Mount Piezo Drive
Ndrive QL/QLe Digital Panel-Mount Piezo Drive
Ensemble QLAB Stand-Alone, 1-4 Axes Piezo Motion Controller

Introduction

Advancing the state-of-the-art needs faster response times, better image quality, finer resolution, and more accurate positioning of optics, test fixtures, and samples. Aerotech’s line of piezo positioning stages and industry leading control systems enable the success of cutting-edge projects in R&D and also manufacturing with unmatched precision and throughput, with the lowest cost of ownership for any piezo positioners.

Aerotech

Aerotech offers system-level mechatronic solutions for the following applications and many more.

  • X-RayTomography
  • Microscopy
  • Biophysics/Cell Physics
  • Astronomy
  • Nanomechanical Testing
  • High-Speed Imaging
  • Fiber Alignment
  • Data Storage
  • Interferometry
  • Auto-Focus
  • Nanophotonics
  • Nonlinear Optical Spectroscopy
  • Nanopositioning
  • Time Domain Spectroscopy
  • Automated Optical Inspection

QNP-L Piezo Nanopositioners

Piezo Nanopositioners

  • Mounting compatibility with other QNP-series piezo nanopositioners
  • Open-loop and vacuum versions
  • High-precision, frictionless flexure guidance system
  • Proprietary piezo multi-layer stack actuator
  • Closed-loop travel options of 100, 500, and 250 µm
  • Superior-positioning resolution and linearity with direct metrology capacitive sensor options
QNP-L Series
Features QNP-40-100L QNP-50-250L QNP-60-500L
Closed- Loop Travel 100 μm 250 μm 500 μm
Open-Loop Travel 120 μm 300 μm 600 μm
Linearity 0.01% 0.01% 0.007%

QNP-XY Piezo Nanopositioners

QNP-XY Piezo Nanopositioners

  • High-precision, frictionless flexure guidance system
  • Proprietary piezo multi-layer stack actuator
  • Mounting compatibility with other QNP-series piezo nanopositioners
  • Open-loop and vacuum versions
  • Closed-loop travel options of 100, 250, and 500 μm
  • Superior-positioning resolution and accuracy with direct-metrology capacitive sensor options
QNP-XY Series
Features QNP-40-100XY QNP-50-250XY QNP-60-500XY
Closed-Loop Travel 100 μm x 100 μm 250 μm x 250 μm 500 μm x 500 μm
Open-Loop Travel 120 μm x 120 μm 300 μm x 300 μm 600 μm x 600 μm
Linearity 0.01% 0.01% 0.007%

QNP-Z Piezo Nanopositioners

QNP-Z Piezo Nanopositioners

  • Proprietary piezo multi-layer stack actuator
  • Closed-loop travel options of 100, 250, and 500 μm
  • Open-loop and vacuum versions
  • High-precision, frictionless flexure guidance system
  • Superior-positioning resolution and accuracy with direct metrology capacitive sensor options
  • Mounting compatibility with other QNP-series piezo nanopositioners
QNP-Z Series
Features QNP-40-100Z QNP-50-250Z QNP-60-500Z
Closed- Loop Travel 100 μm 250 μm 500 μm
Open-Loop Travel 140 μm 300 μm 600 μm
Linearity 0.01% 0.01% 0.007%

QNPHD Piezo Nanopositioners

QNPHD Piezo Nanopositioners

  • High-precision, frictionless flexure guidance
  • Long device lifetime
  • Superior positioning resolution and linearity with direct metrology capacitive sensor option
  • Open-loop and vacuum versions
  • Closed-loop travels from 10 μm to 40 μm
  • Direct-drive actuation enables fast response times and higher throughput processes
QNPHD Series
Features QNPHD-30-10L QNPHD-30-25L QNPHD-30-40L
Closed- Loop Travel 10 μm 25 μm 40 μm
Open-Loop Travel 12 μm 32 μm 50 μm
Linearity 0.02% 0.02% 0.02%

QNP2 Two-Axis, Parallel Kinematic, XY Piezo Nanopositioners

XY Piezo Nanopositioners

  • Travels to 120 μm x 120 μm
  • 50 x 50 mm square clear aperture
  • Patent-pending design provides supreme geometric performance
  • Long device lifetime
  • Superior positioning resolution and linearity with direct metrology capacitive sensor option
  • Open-loop and vacuum versions
  • Superior multi-axis accuracy via parallel-kinematic design
  • High-stiffness and dynamics resulting in high process throughput
  • High-precision, frictionless flexure guidance
QNP2- Series
Features QNP2-100-100XYA
Closed- Loop Travel 100 μm x 100 μm
Open-Loop Travel 120 μm x 120 μm
Linearity 0.01%

QNP3 Three-Axis, Parallel Kinematic, XYZ Piezo Nanopositioners

XYZ Piezo Nanopositioners

  • Travels to 120 µm x 120 µm x 12 µm
  • 40 x 40 mm square clear aperture
  • Superior multi-axis accuracy via parallel kinematic design
  • High-stiffness and dynamics resulting in high process throughput
  • High-precision, frictionless flexure guidance
  • Open-loop and vacuum versions
  • Patent-pending design provides unmatched geometric performance
  • Long device lifetime
  • Superior positioning resolution and linearity with direct metrology capacitive sensor option
QNP3- Series
Features QNP3-100-100XYA10Z
Closed-Loop Travel (X x Y x Z) 100 μm x 100 μm x 10 μm
Open-Loop Travel 120 μm x 120 μm x 12 μm
Linearity 0.01% (XY); 0.02% (Z)

Microscope-Objective Piezo Nanopositioners

QFOCUS QF1

Piezo Nanopositioners

  • 100 μm closed-loop and 120 μm open-loop travels (custom travels available)
  • High-stiffness and dynamics resulting in exceptional step-and-settle and scanning performance
  • High-precision, frictionless flexure guidance
  • Clear aperture to 29 mm
  • Long device lifetime
  • Superior positioning resolution and linearity with direct metrology capacitive sensor option
  • Variety of threaded adapters for quick and easy attachment to the microscope and objective
QFOCUS QF1 Series
Features QFOCUS QF1
Closed-Loop Travel 100 μm
Open-Loop Travel 120 μm
Linearity 0.01%

QFOCUS QF-46

QFOCUS QF-46

  • Long device lifetime
  • Superior positioning resolution and linearity with direct metrology capacitive sensor option
  • Mounting flexibility with a wide range of threaded adapters or mounting holes for custom mounting arrangements
  • Clear aperture to 29 mm diameter
  • Travels from 100 μm to 300 μm
  • High-stiffness and dynamics resulting in exceptional step-and-settle and scanning performance
  • High-precision, frictionless flexure guidance
QFOCUS QF-46 Series
Features QF-46-100Z QF-46-250Z
Closed-Loop Travel 100 μm 250 μm
Open-Loop Travel 120 μm 300 μm
Linearity 0.01% 0.01%

QFOCUS QF-50

QFOCUS QF-50

  • Greater positioning resolution and linearity
  • Mounting flexibility
  • 29 mm diameter clear aperture
  • 400 μm closed-loop travel; 450 μm open-loop travel
  • Exceptional step-and-settle and scanning performance
  • Designed for use with larger, high-NA objectives
QFOCUS QF-50 Series
Features QF-50-400Z
Closed-Loop Travel 400 μm
Open-Loop Travel 450 μm
Linearity 0.01%

Ensemble QDe Networked Desktop Piezo Drive

Desktop Piezo Drive

  • High-precision 20-bit sensor resolution for capacitive sensor feedback
  • Thermally-stable feedback circuit design
  • Configurable 18-bit analog input for external feedback sensor integration or command generation
  • Networkable with any Ensemble drive to control up to 10 axes of piezo and/or servomotor stages
  • Multi-axis Position Synchronized Output (PSO) for real-time triggering of events

Ensemble QL/QLe Networked Panel-Mount Piezo Drive

Panel-Mount Piezo Drive

  • Thermally-stable feedback circuit design option
  • Configurable analog input (to 18-bit) for external feedback sensor integration or command generation
  • Enhanced control features such as harmonic cancellation, learning control, and command shaping improve tracking error and complete process throughput
  • Ethernet and USB 2.0 communication interfaces
  • Networkable with any Ensemble drive to control up to ten axes of piezo and/or servomotor stages
  • Single or multi-axis Position Synchronized Output (PSO) for real-time triggering of events
  • Available with high-precision (to 20-bit) sensor resolution for capacitive sensor feedback

Ndrive QL/QLe Digital Panel-Mount Piezo Drive

Panel-Mount Piezo Drive

  • Deterministic FireWire® high-speed serial communication protocol
  • Single- or multi-axis Position Synchronized Output (PSO) for real-time triggering of events
  • Available with high-precision (to 20-bit) sensor resolution for capacitive sensor feedback
  • Configurable analog input (to 18-bit) for external feedback sensor integration or command generation
  • Designed to be employed with the Automation 3200 (A3200) motion controller
  • Real-time distributed control architecture permits synchronized motion control on up to 32 axes of piezo and/or servomotor stages

Ensemble QLAB Stand-Alone, 1-4 Axes Piezo Motion Controller

Piezo Motion Controller

  • Configurable, high-resolution analog input for external feedback sensor integration or command generation
  • Enhanced control features such as harmonic cancellation, learning control, and command shaping improve tracking error and overall process throughput
  • Touch screen with intuitive menu-driven interface for quick and effortless access to system functionality
  • Control 1 to 4 axes of piezo nanopositioning stages in open or closed-loop operation
  • Configurable closed-loop and open-loop control in one controller platform
  • High-precision 20-bit sensor resolution for capacitive sensor feedback in closed-loop operation
  • Thermally-stable feedback circuit design
  • Ethernet and USB 2.0 communication interfaces
  • Program in AeroBasic using Aerotech’s IDE or develop custom remote interfaces with Microsoft .NET including C#, VB.NET,C++/CLI, LabVIEW®, MATLAB®, TANGO, or EPICS
  • CE approved and NRTL safety certification; follows the 2011/65/EU RoHS 2 Directive
  • Advanced Windows®-based remote diagnostics, tuning, and programming interface software

Aerotech, Inc

This information has been sourced, reviewed and adapted from materials provided by Aerotech, Inc.

For more information on this source, please visit Aerotech, Inc.

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