Veeco Instruments Inc. announced today that it received $11.8 million in orders for its family of automated Atomic Force Microscopes (AFMs) during the fourth quarter of 2003. This is the highest bookings quarter for Veeco’s automated AFMs since these systems were introduced in 2001.
Included in these orders were the first from Taiwan for Veeco’s Dimension X product, introduced last year for advanced etch metrology applications. Veeco also received two orders for its Dimension X3D in-line three-dimensional AFM for 65 nm advanced process development and high volume photomask manufacturing applications. In addition, Veeco received a follow-on order from an Asian customer for its new Vx340 for chemical mechanical planarization (CMP) production and its first 300mm automated AFM system was sold in China to a new foundry.
According to Don Kania, Ph.D., President of Veeco, “These strong orders in the fourth quarter reflect the semiconductor industry’s need for increased levels of accuracy and productivity in critical metrology. As capacity demands increase at feature sizes smaller than 90 nm, Veeco continues to work closely with our customers to meet these technology challenges and to stay ahead of their roadmaps.”
Veeco offers a broad range of non-destructive AFMs for many applications. These instruments are used by all of the top 10 integrated device manufacturers worldwide, with an installed base of over 120 automated systems.