Bruker’s QUANTAX Micro-XRF Spectrometer

The QUANTAX Micro-XRF with the XTrace micro-spot X-ray source enhances a SEM with the capabilities of a Micro-X-ray fluorescence spectrometer. XTrace is fitted on a free inclined chamber port. The user benefits from both the trace element sensitivity and the higher information depth of XRF analysis.

High fluorescence intensities can be generated using polycapillary X-ray optics on very small sample areas. X-ray optics collect tube radiation from a large solid angle and concentrate the X-rays on spots down to 35µm in diameter for Mo-K radiation.

The generated X-ray fluorescence spectrum is determined using an attached XFlash® silicon drift detector, belonging to an existing QUANTAX EDS system. The use of an XFlash® SDD offers excellent energy resolution, as determined by the detector specifications. Count rates of about 40kcps can be achieved in the analysis of metals, using a 30mm2 active area detector.

Key Features

The key features of Quantax Micro-XRF include:

  • Samples can be analyzed with EDS and micro-XRF without the need for a position change
  • Both measurement methods are implemented in the same analytical software suite – ESPRIT, enabling method change with a mouse click
  • XTrace does not interfere with standard SEM operation and EDS, it can remain in a fixed position suitable for most tasks
  • Direct analysis of identical sample positions with different methods
  • Easy combination of analytical results gained through different methods
  • Analytical results can be compared with standalone systems
  • Image tiling helps mapping large areas
  • Three primary radiation filters to suppress diffraction peaks
  • Uses the SEM stage, no separate stage needed
  • Easy avoidance of diffraction peaks in XRF spectra through SEM stage rotation
  • Allows sample tilt to produce minimum spot sizes


XTrace considerably improves the versatility of element analysis in the scanning electron microscope. It covers applications in materials analysis (e.g. metals, catalysts) forensics (e.g. paint, glass, gunshot residue), geoscience and many others. Applications include:

  • Characterization of multilayer samples
  • Metals and hazardous elements in polymers
  • PCBs and electronic components
  • Versatility in SEM Analysis
  • Reliable metals and alloy identification

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