Posted in | Profilometers

The MicroXAM – 800 White Light Interferometer for 3D Measurement of Surface Topography from KLA

KLA MicroXAM-800 is an optical surface profiler that joins the company’s surface metrology product line. It is a non-contact, white light interferometer that stands apart due to its simple yet innovative user interface. The interferometer is designed with numerous powerful functions to support a wide range of applications.

The MicroXAM-800 contains several hardware and software features that are needed to adhere to rigorous R&D and production environment requirements. The hardware and software consist of simple recipe set-up, scripting, programmable stages and an expandable library of analysis instruments.

Key Features

The key features of the MicroXAM-800 include:

  • Flexible platform for data acquisition and analysis
  • SMART and ZSI acquire algorithms simplify measurement setup
  • Easy and flexible script setup with drag and drop functions
  • Wide range of sample stages, objectives, and options are available
  • Fast 3D step height, roughness, and defect characterization


The main applications of the MicroXAM-800 include:

  • Solar
  • LED
  • MEMS
  • Power devices
  • Precision surfaces
  • Semiconductor
  • Medical devices
  • R&D and production for measuring step height, texture and form.

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