EVO MA with SmartSEM Touch - Interactive SEM Analysis

The ZEISS EVO series incorporates high definition Scanning Electron Microscopy with an intuitive user-friendly experience.

SmartSEM touch user interface helps to discover considerable improvements in productivity and dramatically reduced training costs. This interface will also allow users to generate exceptional images and obtain the highest throughput for visual inspection workflows. SmartSEM touch is a welcome addition in the multi-user environment.

The latest detector technology provides excellence in extended pressure (EP) imaging, variable pressure (VP) and high vacuum (HV). A change in imaging efficiency is brought about by vital improvements in signal yield and contrast ratio.

EVO delivers accurate, rapid, repeatable results across all samples because it is a highly flexible, easy-to-use, high definition imaging and analysis tool.


Control at Your Fingertips

  • SmartSEM touch is easy-to-use, fast to learn, and delivers interactive workflow control
  • Automatically obtain images across large areas by just swiping a finger, providing time for post-acquisition analysis
  • Designed for academic users in mixed-ability environments and industrial operators requiring automated workflows for visual inspection tasks
  • Benefit from significantly reduced training times, and stunning images can be captured within minutes

Intelligent Imaging – High Throughput

  • SmartBrowse collects and presents data as an interactive map to provide complete understanding of the sample
  • Free-form regions of interest (ROIs) for unattended automated image acquisition are provided by automated intelligent imaging
  • Reduce 400 manual steps to just 15, imaging four points of interest on nine specimens at three different magnifications
  • The highest productivity in manufacturing and quality control is achieved by EVO

As Flexible As It Is Easy To Use

  • An ideal platform for imaging heavy, large aerospace and automotive components is provided by robust stage options
  • A choice of chamber size and electron source ensures EVO can be perfectly configured for demanding imaging, EBSD, WDS and EDS applications
  • Future-assured upgrade path ensures EVO can meet the challenge of rapidly increasing application requirements

SmartSEM touch

Benefit from a fast time-to-result and a reduction in training overhead with automated unattended operation and short learning curve. Tasks are placed in easy-to-understand groups by an uncluttered workflow-oriented layout.

Familiar touch gestures can be used to rapidly load, navigate, acquire and browse images. Images across large regions of interest can be automatically acquired by just drawing directly on the screen. A “lay-flat” configuration improves image sharing and exploration when working in small collaborative groups.

Chamber Sizes


EVO MA benefits from three chamber sizes and a variety of software options and detectors. EVO MA can be upgraded to full environmental SEM operation (EVO LS).

EVO MA 10 is the SEM for several materials analysis samples. It is considered to be the perfect imaging solution for materials analysis because of its large motorized 5 axis stage, easy to use SmartSEM software suite, and versatile accessory options.

EVO MA 10 includes:

  • Maximum specimen height of 100 mm
  • Stage movement of 80 x 100 x 35 mm (XYZ)

EVO MA 15 is the SEM for a wide range of sample weights and dimensions. Application fields include failure analysis, forensics, and geology.

EVO MA 15 includes:

  • Port for WDS instrumentation
  • Maximum specimen height of 145 mm
  • Stage movement of 125 x 125 x 50 mm (XYZ)

EVO MA 25 is the SEM for heavy and large samples. Application fields include printed circuit boards, flat panel displays, aerospace, car manufacturing, museum artifacts and forensics.

EVO MA 25 includes:

  • Support for two chamberscopes
  • 4 quadrant and 5 segment backscatter imaging
  • Maximum specimen height of 210 mm, diameter of 300 mm and weight of 5 kg
  • BeamSleeve option for stage movement of 130 x 130 x 60 mm or 130 x 130 x 80 mm (XYZ)

Detector Technology

  • The standard is set for Variable Pressure and Environmental Scanning Electron Microscopy by EVO detector technology
  • The Extended Range Cascade Current Detector (C2DX), unique to the EVO Series, is custom designed so that it provides superior imaging performance at the highest pressures up to 3000 Pa
  • EVO’s Cascade Current Detector (C2D) with its high sensitivity detector electronics ensures providing low-noise, outstanding images even in the extremely demanding VP applications
  • The advanced detector technology helps to achieve the best imaging performance in variable pressure mode


The flexibility and analytical imaging of EVO MA can be used for a variety of applications including:

Metals and Steels

  • Coplanar EBSD and EDS geometry provides microstructural characterization of grain boundaries, slip system activity, strain analysis and phase identification
  • Crystallographic and compositional analysis of advanced alloys and duplex steels
  • Imaging and analysis of the structure metals, non-metallic inclusions, and fractures

Natural Resources

  • Cathodoluminescence (CL) imaging of geological samples with clear streak-free imaging of carbonates
  • Image core samples in VP mode with both HDBSD and the C2D detector to obtain maximum compositional and structural information
  • Mineralogy, morphology, and composition analysis of geological samples

Materials Research

  • Combine HDBSD with Beam Deceleration technology plus coplanar EDS and EBSD for comprehensive materials analysis
  • Examine material properties such as coating performance, temperature resistance and corrosion
  • Analyze and develop novel materials

Semiconductors and Electronics

  • Compositional and visual analysis of contamination, flaws and corrosion
  • Perform electron beam induced current experiments to establish component performance
  • Regular inspection of board level components and PCBS


  • Bullet comparison sub-stage for analysis of bullet or cartridge case
  • Class leading EDS geometry provides high throughput GSR analysis with compatibility with third-party specialized GSR analysis software
  • Examine criminal evidence including toxicology, coin forgery and gunshot residue

Aerospace and Automotive

  • High throughput compositional analysis of engine wear debris and particles
  • Examine improved composite materials, textiles and coatings in variable pressure mode
  • Large chamber sizes and robust, flexible stage options allow handling of heavy, large automotive components

Watch the Product Trailer

EVO MA with SmartSEM Touch: Interactive SEM Analysis

Bulb filament
Fractured material
Fractured sample
Control at Your Fingertips
Intelligent Imaging – High Throughput
As Flexible As It Is Easy To Use
SmartSEM touch
Cascade Current Detector (C2D)
Surface wear on a ball-bearing
BSE image of nickel sulphide ore
Aluminium nanofibers
Surface damage on an integrated circuit
A fragment of molten glass
Fibres from a composite aerospace material

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