GeminiSEM Family FE-SEMs for Low Voltage, Sub-Nanometer Images

Gemini Optics, Low Voltage, Variable Pressure

The GeminiSEM family stands for effortless imaging. Users can obtain sub-nanometer resolution and high detection efficiency, even in variable pressure mode.

The GeminiSEM 500 integrates the proven Gemini technology with a new electron optical design. Users can achieve better resolution, especially at low voltage. With 20 times greater Inlens detection signal, crisp images can be acquired quickly with minimum sample damage. With the novel variable pressure mode, users will feel like they are working in high vacuum conditions.

Users can obtain a reliable and flexible field emission SEM for their research, imaging facility, or industrial laboratory. With the GeminiSEM​ family, excellent images can be acquired from any real world sample.

Highlights

More Detail at Low Voltage

  • Enjoy short time-to-image with the proven Gemini technology
  • Resolve nanoscale details with high resolution and contrast at low voltages
  • Users can resolve 1.2 nm at 500 V; get 1.1 nm resolution at 1 kV, or realize a resolution of up to 0.9 nm by applying the optional beam deceleration – the Tandem decel. They can benefit from perfect image quality, without requiring sample bias

More Signal at All Times

  • Either reduce time to image or work with very low currents to avoid sample damage
  • Profit from improved detection efficiency with GeminiSEM 500's new lens design. It boosts the Inlens SE signal up to 20 times compared to classis SEM designs
  • Increase efficiency and get maximum information from the sample by detecting exactly the right electrons

More Flexibility with Variable Pressure

  • True Inlens detection can be used at variable pressure for the first time. Images can be acquired with high resolution, contrast, and signal-to-noise ratio
  • Work in variable pressure (VP) mode and feel like working in high vacuum
  • Crisp images can be acquired from even the most challenging, non-conductive samples

Gemini Optics

Based on Proven Gemini Technology

  • Gemini beam booster technology ensures high signal-to-noise ratios and small probe sizes
  • The Gemini Inlens detection concept guarantees efficient signal detection by detecting secondary (SE) and backscattered (BSE) electrons in parallel, reducing time-to-image
  • The Gemini objective lens design integrates magnetic and electrostatic fields to maximize optical performance and reduces field effects at the sample. This allows excellent imaging, even on complex samples such as magnetic materials

More Detail, More Signal

  • Users can benefit from better detection efficiency and improved resolution by applying a deceleration voltage to the sample - with the Tandem decel to achieve sub-nm resolution below 1 kV
  • GeminiSEM 500 features a new electron optics: the newly designed Nano-twin lens further enhances resolution at low beam voltages
  • The high-resolution gun mode reduces chromatic aberration and enables even smaller probe sizes
  • The Inlens detector signal is increased by up to 20 times under low voltage imaging conditions. Crisp images can be acquired quickly with minimum sample damage

GeminiSEM 300

The GeminiSEM 300 is perfect for imaging large fields of view with fast-time-to-image and excellent image quality. With the Gemini optics, users can rely on excellent resolution, efficient detection, and distortion-free, large area images. They can benefit from the new optical design that is customized to low voltage imaging even for complex samples, such as magnetic or beam-sensitive materials.

Samples can be comprehensively characterized – users can obtain unique low voltage, material contrast with the energy selective backscatter detector. In the NanoVP mode, non-conductive specimens can be imaged at high resolution with excellent surface sensitivity, using the Inlens SE detector at higher pressures.

Variable Pressure

More Detail, More Flexibility

  • NanoVP technology reduces beam broadening and helps image high-resolution details as well as true in-lens detection up to 150 Pa
  • Reduce charging on non-conductive samples
  • Pressure can be increased up to 500 Pa using chamber VPSE detection for highly complex samples
  • Inlens EsB and SE detectors can be used simultaneously in VP mode for high-resolution surface and materials contrast imaging

Watch the Product Trailer

GeminiSEM Family FE-SEMs for Low Voltage, Sub-Nanometer Images

Etched silicon nanostructures
Gol nanoparticles on polystyrol
Moth wing
Fibrous polymer microstructures
Silver nanoparticle coated natural fibers
More Detail at Low Voltage
More Signal at All Times
More Flexibility With Variable Pressure
Based on Proven Gemini Technology
More Detail. More Signal
More Detail. More Flexibility

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