Piezo Nanopositioning Stages Ideal for Optical Microscopy: QNP2 Series XY

Aerotech’s QNP2 series XY, parallel-kinematic, piezo positioning stages integrate sub-nanometer resolution, excellent geometric performance, and high dynamics in a compact, low-profile package.

The QNP2-100-XYA is provided with a 50 mm x 50 mm clear aperture with closed-loop travels up to 100 µm x 100 µm (open-loop travels to 120 µm x 120 µm). The design is perfect for scanning probe microscopy, optical microscopy, x-ray transmission microscopy, and other applications where two-sided part access is necessary.

  • Patent-pending design provides unparalleled geometric performance
  • 50 x 50 mm clear square aperture
  • Excellent multi-axis accuracy via parallel-kinematic design
  • Travels to 120 µm x 120 µm
  • Custom materials and vacuum versions

Precision Design

QNP2 piezo stages have a parallel-kinematic flexure and metrology design that ensures the maximum level of multi-axis accuracy. FEA-optimized precision flexures provide high-stiffness and long device life. High stiffness and resonant frequency enable outstanding process throughput and rapid closed-loop response. A patent-pending drive design reduces yaw errors while maintaining an Abbe-compliant metrology system.

All QNP2 piezo stages are available with open-loop (no feedback) or closed-loop feedback (-C). The unique capacitive sensor parallel-metrology design helps to measure the output of the positioning carriage directly, enabling 0.15 nm resolution, 1 nm bidirectional repeatability, and 0.01% linearity.

Ultra-Precision Control with Options

Aerotech’s Q-series controllers and drives offer several convenient software options. The Dynamic Controls Toolbox and Motion Designer packages have a range of advanced yet easy-to-use tools such as Harmonic Cancellation, Learning Control, and Command Shaping to improve step-and-settle times and enhance tracking errors. Aerotech’s controller architecture easily enables tightly-controlled coordinated motion between servos, piezo stages, galvos, and steppers, and high-speed.

An optional mounting plate allows direct mounting to metric or English breadboard optical tables, and a solid tabletop is available. QNP2 piezo stages are also provided in vacuum-prepared versions and custom materials.

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