High-Dynamic Linear Piezo Nanopositioning Stages for Semiconductor Wafer Articulation

  • Open-loop and vacuum versions
  • Closed-loop travels from 10 µm to 40 µm
  • Direct-drive actuation and 6300 Hz resonant frequency
  • 0.02 nm resolution and 0.02% linearity with direct-metrology capacitive sensor option

The QNPHD linear piezo nanopositioning stages from Aerotech provide the benefits of both an actuator and a stage in one compact, high-stiffness package. With a direct-metrology, capacitive sensor feedback option, high load capacity, and high resonant frequencies, the QNPHD is suitable for a variety of high-speed and high-precision applications such as scanning probe microscopy, semiconductor wafer articulation, and disk-drive testing.

A direct-drive actuation design and optimized structure enable millisecond response and move-and-settle times. High-dynamics, prolonged device life, and high-stiffness are ensured by FEA optimized precision flexures, while maintaining outstanding geometric performance (straightness and angular errors) for nanopositioning applications that are critical.

Optional closed-loop feedback using a unique capacitive sensor design permits sub-nanometer resolution and single-digit nanometer linearity errors. The output of the positioning carriage is measured directly by the capacitive sensors, enabling superior accuracy and repeatability.

The QNPHD, when integrated with Aerotech’s Q-series controllers and drives, demonstrates sub-nanometer positioning resolution and high-positioning bandwidth. The Dynamic Controls Toolbox and Motion Designer software packages from Aerotech provide a host of improved yet easy-to-use tools such as Command Shaping, Harmonic Cancelation, and Learning Control, providing enhanced tracking errors and faster step-and-settle times.

The stage and all operational parameters are automatically identified by Aerotech’s FlashConfig feature, which also uploads axis calibration data ensuring accurate, safe, and true “plug-and-play” operation.

The QNPHD is available with side and rear cable exit options with mounting features for both vertical and horizontal orientations. This flexibility enables the user to orient and package the stage for the most optimal arrangement without designing different adapter plates and brackets that increase design complexity and size. Custom designs and vacuum-prepared versions are available upon request.

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