Using the NewView™ 8000 Series for Fast Non-Contact Measurements

The NewView™ 8000 series of 3D optical surface profilers from ZYGO® offers substantial versatility in non-contact optical surface profiling. They perform rapid, non-destructive measurements, and do not require any sample preparation. Advanced software tools are used to characterize and quantify critical dimensions step heights, surface roughness, and other topographical features with outstanding precision and accuracy.

Profile heights can differ from < 1 nm to 20000 µm, at high speeds, irrespective of surface texture, magnification, or feature height.

The NewView™ 8000 series of profilers use ZYGO®'s patented technology for Coherence Scanning Interferometry (CSI) to easily measure many surface types, including stepped, flat, rough, smooth, and sloped.

Performance, Value, and Versatility

The NewView™ 8000 profilers are offered in two configurations: a single zoom NewView 8200 configuration and a triple zoom-equipped NewView™ 8300 system.

Regardless of the model chosen, all NewView™ 8000 systems offer high-accuracy measurements and ease of use, and have a wide range of cost-effective applications, making the systems the ideal choice for versatility and value in 3D optical profilers.

Advanced Analysis and Control Software

The NewView™ 8000 series makes use of the all-new Mx™ software for total system control and data analysis, including smart measurement navigation, quantitative topography information, pass/fail limits, built-in SPC with statistics, rich interactive 3D maps, and control charting.

  • Flexible Analysis - a broad range of data views, quantitative results, and filters are included
  • Intuitive user interface with a workflow-based design makes it simple to learn and use
  • Interactive 3D plots - zoom, pan, rotate, and update results in real-time
  • Integrated SPC analysis tools monitor pass-fail criteria, track process statistics, and track results

Other application modules for specific requirements, such as measurement in the presence of transparent films, and 2D vision analysis, are available for customers who require these capabilities.

Mx Software Screen (click image for a larger view)

NewView 8000 Series Optical Profiling System

Flexible Configurations

The NewView™ 8000 profilers have an open work region, with clear lines of sight, in order to help make measurement setups and changeovers simple and fast.

Systems can be provided with a variety of sample staging, ranging from wholly manual X/Y and tilt stages, to completely automatic stages with 4° of tilt and 150 mm of travel.

The compact size and integrated isolation system make the systems ideally suited for benchtop installations, and the optional stand and workstation make them a suitable production-style system.

The open work area features clear lines of sight

Key Features

The main features of the NewView™ 8000 series of 3D optical surface profiler are as follows:

  • Speedy non-contact measurements
  • Enhanced optical imaging
  • Leading-edge precision and gauge capability
  • Sub-angstrom precision
  • Better 3D surface visualization
  • Two models to choose from: single zoom or triple zoom

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