The Nexview™ 3D optical surface profiler launched by ZYGO® is capable of measuring topography of all surface types, ranging from rough to smooth, with sub-nanometer accuracy, independent of field of view.
Measurement types comprise of thin films, steep slopes, flatness, roughness, and large steps and segments with feature heights ranging from <1 nm up to 20000 µm.
The Nexview™ profiler has the potential to measure a super-polished optical surface comprising of sub-Angstrom surface roughness, to steep machined angles up to 85°. This profiler provides the best qualities of a variety of other profiling technologies such as stylus, focus scanning and confocal without their shortcomings. The Nexview™ profiler prevents users from choosing a profiler based on the surface type they want to measure.
The all-new Mx™ software is also utilized by the Nexview™ profiler. This software powers system control and data analysis such as control charting, quantitative topography information, built-in SPC with statistics, pass/fail limits, intuitive measurement navigation, and rich interactive 3D maps.
The main features of the Nexview™ 3D optical surface profiler are as follows:
- Intuitive user interface
- Streamlined design
- No-compromise profiling
- Vibration tolerance technology
- All new analysis and control software
- All new graphical workflow software
- Gage capable performance
- 3D and non-contact measurement
- Automated operation
- ISO 25178 surface measurement parameters
Overview of ZYGO Nexview™ NX2 Non-Contact Optical Profiling System