Posted in | Control Systems

Air Sentry II Mobile AMC Detection System for Monitoring Airborne Molecular Contamination

The AirSentry II Mobile AMC Detection System from Particle Measuring Systems (PMS) has been designed to improve fixed Airborne Molecular Contamination (AMC) monitoring programs. This new detection system is considered to be the first truly mobile system; ideal for monitoring airborne molecular contamination in cleanrooms. Mobility plays a vital role in a strategic airborne molecular contamination monitoring program, enabling rapid location, quantification and elimination of contamination sources.

Instant feedback of AMC levels at every single monitoring location is provided by a local touch PC on the mobile cart. While monitoring the specific environment, data storage and graphical displays are provided by Facility Net software.

Chemically filtered, onboard, clean dry air (CDA) and vacuum are supplied within the cart enclosure in order to guarantee that the analyzers can sample instantly upon relocation without the long analyzer warm-up times which are a downside of competitive systems.


The key features of the AirSentry II Mobile AMC Detection System include:

  • Optional wireless data communication
  • Touch PC and software display real-time and historical concentration data
  • Battery back-up allows uninterrupted sampling, even during transport
  • Onboard compressor, vacuum pump, chemical filter and air-dryer
  • Airborne Molecular Contamination Mobile cart, which moves the system rapidly to high-priority sample locations
  • High-sensitivity AirSentry II ion mobility spectrometry (IMS) analyzers detect acids, chlorides, ammonia and amines


Following are the main benefits of the AirSentry II Mobile AMC Detection System:

  • AMC analyzers available when and where needed; to be deployed anytime
  • Characterization of airborne molecular contamination (AMC) levels in multiple areas of bigger cleanrooms
  • Non-stop actionable data in the process tool and facility
  • Pinpoint AMC issues in real-time, by identifying airborne molecular contamination sources


The key applications of the AirSentry II Mobile AMC Detection System are as follows:

  • Testing and validation of chemical filtration performance
  • Testing of AMC levels within process tools and mini-environments
  • Isolation and verification of AMC events identified by multi-point monitoring systems
  • Spatial identification and troubleshooting of airborne molecular contamination sources

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