Enhanced Throughput Module - ETM

Design Features

  • Greatly reduces undesirable effects of frame motion on the servo system
  • Compatible with all current Aerotech controllers
  • Significantly improves move-and-settle time and contouring performance
  • Increases throughput of existing and new machines

The positioning performance of high-dynamic motion systems is improved using Aerotech's Enhanced Throughput Module (ETM) which measures the unwanted movement of the machine base directly and relaying it back to the controller.

By working together with the Aerotech controllers and the Dynamic Controls Toolbox, they permit the servo system to do a better job of achieving the required motion path.

Unwanted base motion usually happens because the force which is used to accelerate the stage reacts against the machine frame. The machine frame responds with an oscillation that can expand over hundreds of milliseconds (Figure 1, above).

High-dynamic motion or fine positioning means that it is necessary for the controller to wait for this oscillation to recede before continuing with the process.

This causes inaccurate motion or forces the controller to wait, both of which decrease productivity. The best solution is an optimized frame and machine-base design, but in a lot of cases this is either not practical or is too expensive.

The Aerotech ETM provides an inexpensive solution for enhancing the productivity of new and existing equipment with simple installation and no changes to existing mechanical hardware.

Figure 2 shows a point-to-point move. As can be seen from the plot, the Dynamic Controls Toolbox and the ETM can reduce settling time by 21%. Figure 3 shows integration on a Hermesys™ system and Figure 4 shows integration on the AGS15000.

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