The Thermo ScientificTM Phenom Pharos is a desktop SEM having a FEG source that delivers crisp, high-brightness images, thereby offering the benefits of a FEG source to everyone. It is also user-friendly, from the first installation to the actual usage, as a result of its intuitive and compact design.
The latest hardware design and detectors enable quick imaging and easy foolproof handling.
Specifications
| |
Phenom Pharos Desktop SEM
 |
Phenom XL Desktop SEM
 |
Phenom ProX Desktop SEM
 |
| Light optical magnification |
20– 134x |
3 - 16x |
20 - 134x |
| Electron optical magnification range |
200– 1,000,000x |
80 - 100,000x |
80 - 150,000x |
| Resolution |
4 nm (BSD) & 3 nm (SED) |
< 14 nm |
< 10 nm (BSED) & < 8 nm (SED) |
| Digital zoom |
Max. 12x |
Max. 12x |
Max. 12x |
| Light optical navigation camera |
Color |
Color |
Color |
| Acceleration voltages |
Default: 5 kV, 10 kV and 15 kV
Advanced mode: adjustable range between 2 kV and 15 kV |
Default: 5 kV, 10 kV and 15 kV
Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging and analysis mode Secondary Electron Detector |
Default: 5 kV, 10 kV and 15 kV
Advanced mode: adjustable range between 4.8 kV and 15 kV imaging and analysis mode |
| Vacuum modes |
• Charge reduction mode (low vacuum mode)
• High vacuum mode
• Medium vacuum mode |
• Charge reduction mode (low vacuum mode)
• High vacuum mode
• Medium vacuum mode |
• Charge reduction mode (low vacuum mode)
• High vacuum mode |
| Detector |
• BSD
• EDS (optional)
• SED (optional) |
• BSD
• EDS (optional)
• SED (optional) |
• BSD
• EDS
• SED (optional) |
| Sample size |
• Up to 32 mm (Ø) |
• Max. 100 mm x 100 mm
• Up to 36 x 12 mm pin stubs |
• Up to 32 mm (Ø) |
| Sample height |
Up to 100 mm (h) |
Max. 65 mm |
Up to 100 mm (h) |