AFM, Laser microscope, Electrobalance, SPM, Microhardness tester, Interferometer, Electron scale surface roughness tester and other precision instruments
6DOF Active Vibration Control
The 6DOF active control produces a non-resonant vibration isolation effect that delivers extraordinary performances across the whole frequency spectrum.
Clean Room-Compatible
The possibility of air contamination is eliminated with an aluminum surface plate and body. It also does not need an air supply.
LCD Monitor (Standard Equipment)
- Accelerogram
- Acceleration response spectrum
Automatic Leveling and Clamping
Automatic leveling and automatic clamping for transport can be activated with the push of a button.

6DOF active vibration control produces outstanding vibration isolation performance.

Gold nanoparticles supported on SiO2 / Si (111)
Scan size: 500 nm x 500 nm
Specifications
- Dimension (W × D × H): 400 mm × 500 mm × 80 mm
- Maximum load capacity (loading impartially): 120 kg
- Product mass: 19 kg
- Power supply: AC 85 - 264 V single-phase 50/60 Hz
- Isolation Technology: Across all frequencies, translation, and rotational directions (six freedoms).
- Force Directions: Active compensation in all six degrees of freedom
- Isolation Performance: 5 Hz = 25 dB, 10 Hz = 40 dB
- Active Bandwidth: 0.8 or less ~ 100 or more Hz
- Max Compensation Level: 0.35 gal (RMS) at 5 Hz with a load of 60 kg
- Stroke of the Actuator: 2 mm
- Max Correction Forces V = Vertical: 16 N
- Max Correction Forces H = Horizontal: 8 N
- Repeatability of Load Adjustment: 0.1 mm