Posted in | AFM Raman Systems

Large-Sample Atomic Force Microscope (AFM) — Jupiter XR AFM

Oxford Instruments’ Asylum Research Jupiter XR Atomic Force Microscope is the first large-sample AFM to provide not just high-speed imaging but also extended range in a single scanner.

Jupiter offers complete 200 mm sample access and provides faster results, higher resolution, a simpler user experience, and the flexibility to outperform in industrial R&D laboratories and academic research.

Highest Performance

  • Extended-range scanner captures images in 5–20× less time compared to typical AFMs, while offering large 100 µm X-Y and 12 µm Z ranges
  • Higher resolution compared to other large-sample AFMs
  • Unique blueDrive™ Tapping Mode offers results that are more reproducible and simplifies operation

Simpler User Experience

  • The high-speed stage, which is completely addressable, has the ability to quickly reach any point on 200 mm samples
  • Completely motorized laser and detector configuration avoids the need for manual adjustments
  • Users can go from atoms to large 100 µm scans and choose any imaging mode, using just the single XR scanner
  • Sharp top-view optics help users to easily locate the exact region of interest

Flexibility for Diverse Research Requirements

  • Support for a complete range of imaging modes
  • Flexible software renders routine measurements easy and enables advanced research
  • Modular design allows for simple and fast addition of accessories and future upgrades

Higher Resolution

  • Compared to all other large-sample AFM, Jupiter has the lowest noise floor, of <25 pm
  • Even smaller features can be resolved and ultra-flat samples can be measured more accurately

Faster Imaging

  • It is possible to image many common types of samples at a line rate of ≥20 Hz for typical scan sizes of <10 µm
  • Images can be captured within a timeframe of 1 minute on a regular basis, which is at least 5× faster compared to a majority of other AFMs

blueDrive Tapping Mode

  • Asylum’s unique blueDrive renders tapping mode more stable and simpler
  • blueDrive is integrated in every Jupiter instrument to ensure maximum performance and productivity
  • Optimized stability leads to longer lifetimes of the tip, even with fast scanning

Fast and Simple Setup

  • The SpotOn™ feature allows point-and-click alignment of the laser and detector
  • Samples can be kept fastened to the 210 mm chuck either magnetically or by vacuum
  • Probes can be easily exchanged on the removable Z scanner

Quickly Find the Region of Interest

  • High-speed stage enables navigation over the entire stage within 5 seconds and allows accurate micron-scale positioning through joystick or software
  • Since the stage is completely addressable, it can reach any point on 200 mm samples without the need to reposition the samples
  • Top-view optics can be fully adjusted using the software to ensure sharpest, highest resolution (<1.5 µm) view of the samples

Jupiter XR Can Do It All

  • Modular design enables Jupiter to readily accept future upgrades to any of its components
  • Extended-range 100 µm X-Y and 12 µm Z scanners offer highest performance, starting from ultra-high resolution imaging up to the biggest scans
  • Jupiter XR scanners are compatible with all modes and optional accessories

Due to its higher speed, higher resolution, and ease of use, Jupiter XR improves even simple measurements. In the case of advanced research, Jupiter also provides a complete set of imaging modes and accessories, thereby making Jupiter best-suited for any lab with a diverse range of needs or for multi-user facilities.

Quantitative Nanomechanical Measurements

  • Asylum provides various methods for quantitative mapping of storage and loss moduli

Nanoelectrical Measurements of Highest Sensitivity

  • Properties such as surface charge, current, and potential can be evaluated. Additional nanoelectrical characterization methods are upcoming.

Specifications

Jupiter XR Scanner

X-Y sensor noise: <150 pm

X-Y range: At least 90 µm (closed-loop), but typically 100 µm

Scan speed: Although it is based on scan conditions and samples, some common sample types can be imaged at ≥20 Hz line rates for ≤10 µm scan sizes with very little or no image quality degradation. Lower scan rates may be required for rougher samples and larger scans. During typical use, line rates of 5–20 Hz are standard.

Z sensor noise: <35 pm

Z range: 12 µm

(The chucks and X-Y, Z scanners are completely modular and can be easily exchanged for accessory options and future upgrades.)

Cantilever Deflection Sensing

Optical detection light source: Superluminescent diode (SLD) source. The spot size of approximately 10 µm is compatible with small levers, like the Asylum FS-1500, Olympus AC55, and Nanoworld Arrow UHF apart from all standard probes.

Detector bandwidth: DC to 7 MHz

AC detector noise: <30 fm⋅Hz−½ above 100 kHz

DC detector noise: <10 pm

Wavelength: 670 nm (nominal)

Detector adjustment and point-and-click spot positioning are completely motorized and controlled by software.

blueDrive Tapping Mode

The unique blueDrive Tapping Mode of Asylum employs photothermal excitation at 640 nm for the excitation of the cantilever resonance in all AC-based modes. It is incorporated into all Jupiter XR systems. Power adjustments are completely motorized and controlled by software.

Imaging Performance

AC height noise: <25 pm

DC height noise: <25 pm

Top-View Bright-Field Optics

Field of view: 930×1240 µm

Resolution: Diffraction limited (<1.5 µm), NA = 0.30

Illumination: Intensity, field diaphragm, and aperture diaphragm can be adjusted by using the software.

Motorized Stage and Sample Chuck

Motor stage enables any point on a 200 mm wafer to be positioned under the AFM probe (i.e. completely addressable). Maximum stage velocity is 40 mm/s.

Sample chuck accommodates samples with a diameter of up to 210 mm and a height of up to 35 mm. Vacuum rings and wafer locating pins are provided for 2″, 4″, 5″, 150 mm, and 200 mm wafers. Includes eight magnetic mounting points for samples prepared on conventional disks with a diameter of 10–15 mm.

Instrument Isolation

Vibration: Active vibration isolators ensure excellent performance in a broad range of laboratory environments (to be purchased separately).

Acoustic: Integrated enclosure offers isolation of approximately 20 dB.

Integrated Operating Modes

Basic modes: Frequency modulation, contact mode, nanolithography and nanomanipulation, force curves, tapping mode (AC mode), phase imaging, lateral force mode (LFM), and tapping mode with digital Q control.

Nanoelectrical, functional, and electromechanical modes: Magnetic force microscopy (MFM); electric force microscopy (EFM); switching spectroscopy PFM; Kelvin probe force microscopy (KPFM), vector PFM, and dual AC resonance tracking (DART) piezoresponse force microscopy (PFM).

Nanomechanical modes: Contact resonance viscoelastic mapping mode; AM-FM viscoelastic mapping mode; force modulation; bimodal dual AC, loss tangent imaging, and force mapping mode (force volume).

Optional Operating Modes

Current mapping with fast force mapping, conductive AFM (CAFM) with ORCA™ and Eclipse™ Mode, and fast force mapping mode. Other modes are being developed, please inquire for details.

Optional Accessories

A complete range of accessories analogous to those available on the Asylum MFP-3D AFM family is currently being developed.

Warranty

Standard warranty: One-year comprehensive warranty that covers all parts and labor.

Extended warranty: Asylum provides affordable extended warranties.

Large-Sample Atomic Force Microscope (AFM)—Jupiter XR AFM

Optical standard, 100 μm scan - The large scan range on Jupiter XR allows it to scan from atomic-level to microscale features, all with a single scanner. This image was acquired with 512 lines in ~4.5 min at 2 Hz line rate.
HF-etched mica, 2 μm scan imaged in 26 s - The atomic layers in mica are a useful scan speed challenge sample—to track the steps accurately, a higher imaging bandwidth is necessary. This image was acquired with 512 lines in 26 s at 20 Hz line rate.
Lamellae in polyethylene - Crystalline regions consist of tightly packed polymer chains with 0.89 nm periodic spacing. The larger features on the sides are disordered regions.
Cetyl palmitate layer on HOPG - This waxy ester compound forms self-assembled structures on HOPG with periodic spacing of 4.3 nm and height of ~100 pm.
Battery separator membrane - This polypropylene film has been widely used for AFM imaging speed comparisons because it features challenging topography and is relatively delicate. Here, there are no obvious differences in scan quality going from 2 Hz to 20 Hz scan rate and only very subtle changes at 40 Hz.
Fast and Simple Setup
Quickly Find Your Region of Interest
Jupiter XR Can Do It All
Ternary rubber blend - Polymer blend containing polystyrene, polypropylene, and polyethylene imaged with AM-FM Viscoelastic Mapping Mode. Image shows topography overlaid with modulus, 15 μm scan.
Multilayer polymer film - AM-FM modulus image shows the components of a food packaging film.
Carbon nanotubes in polyimide - EFM phase data is overlaid on topography, revealing the locations of carbon nanotubes in the polyimide matrix, 20 μm scan.
Carbon black-filled polymer film - KPFM surface potential imaging was used to show carbon-rich regions of this static dissipative packaging film, 12 μm scan.
Sol-gel piezoelectric thin film - PFM phase data is overlaid on topography, highlighting regions where the piezoelectric response is differently oriented, 2 μm scan.
Automated inspection of epitaxial silicon grain structure - Non-uniform grain size can often be observed in epitaxial silicon layers, especially near the wafer edge where there can be greater variations in processing conditions. Here, an automated routine was used to inspect a series of points at different offsets from the wafer edge. The Jupiter software ffers flexibility in defining these locations at any point on the 210 mm sample chuck. Roughness (Rq) of each image is only 80-85 pm.
blueDrive Tapping Mode Improves Measurement Repeatability - Picture 1
blueDrive Tapping Mode Improves Measurement Repeatability - Picture 2
Coated photo paper - AFM is a useful tool to investigate materials and processes for paper coatings and adhesives.
Tire rubber blend - Bimodal imaging reveals the distribution of rubber compounds and carbon black.
500 pm steps on SiC wafer - Silicon carbide is an important substrate for high-power microelectronic devices.
Insulated-gate bipolar transistor - Single-pass KPFM reveals dopant variations in the emitter regions between trench gates.

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