Using Plasma Polymerization with Nordson MARCH’s PD Series

The PD Series from Nordson MARCH uses plasma polymerization for depositing materials during precision manufacturing processes.

The PD Series for plasma deposition uses a gas vapor delivery system or a heated liquid monomer vapor delivery system to deposit coatings with the potential to reduce and, in certain cases, offer a tie layer, to prevent tackiness, to act as a drug inhibition or enhancement agent in life sciences applications, and to alter desired surfaces from hydrophilic to hydrophobic, or vice versa.

Plasma polymer deposition can lead to a decrease in waste production in comparison to wet chemical dispensing.

Plasma Deposition Equipment Features

The liquid precursor contained in a heated vessel provided in the heated liquid monomer vapor delivery system is temperature controlled to raise its vapor pressure. A heated vapor flow controller uniquely designed for the monomer type is used for delivering the monomer vapor flow to the process chamber. The vapor manifold provided in the plasma chamber is innovatively designed for the specific application to ensure uniform film deposition within the chamber.

The optimum RF plasma energy exposure sets off the polymer deposition, thereby leading to high-quality films. Pulsed plasma RF generation is also provided for enhancing the properties of the deposited polymer films. The PD Series allows selection from an array of process gases like hydrogen, helium, and argon. Different liquid agents can also be vaporized and deposited.

The PD Series systems are a combination of the best of market-leading plasma technology from Nordson MARCH, together with application-specific developments supported by over 30 years of experience. The proven advantages of Nordson MARCH’s exclusive and patented designs have been used in each system, which enables the optimization of the use of the reactive ions that exist in RF plasma, thus increasing treatment uniformity and decreasing process time at the same time.

Models and Configurations

PD-1000 Plasma Treatment System: Pulsed RF is used by the PD-1000 system to enhance the properties of plasma polymerized films. The system is regarded to be ideal for prototype, pilot, or production processing of substrates. The PD-1000 combines the process quality and reliability of the AP-1000 system with the proven advantages of Nordson MARCH’s exclusive shelf design and optimized use of reactive ions that exist in RF plasma, thus enhancing treatment uniformity and decreasing the process time at the same time.

The PD-1000 is a cost-efficient and space-saving vacuum plasma treatment machine for the treatment of a wide range of parts and components. The plasma chamber, which is made of 11-gage stainless steel, is designed with aluminum fixtures to ensure greater durability. The chamber includes a number of removable and adjustable shelves for accommodating different parts and incorporates up to 14 electrode positions. The PD-1000 comes in the standard type and includes two mass flow controllers for matchless gas control.

PD-1500 Plasma Treatment System: The PD-1500 system is regarded to be an efficient plasma treatment system, which includes an extra-large chamber that enables batch processing. A pulsed 40-KHz RF generator is used for enhancing the properties of plasma polymerized films. The PD-1500 is a cost-efficient and space-saving vacuum plasma treatment machine best suited for the treatment of parts and components of all types. The pump, chamber, RF generator, and control electronics are all accommodated inside its housing. The PD-1500 system is equipped with slide-out horizontal shelves that enable simple loading and unloading.

It has a compact and user-friendly design that features a small footprint and has been developed for maintenance access from only the front and rear of the system. Therefore, it is possible to arrange a number of vacuum plasma treatment systems side by side to enhance the utilization of floor space. The pump is positioned on rollers to ensure easy removal. It is possible to password-protect the control system at various levels to prevent unauthorized recipe modification. This ensures the system’s reliable performance from the first batch to the last.

The PD-1500 Plasma Treatment System combines the process quality and reliability of the AP-1500 system. The plasma chamber includes around 14 electrode work shelves and enables greater substrate processing and additional volume when compared to the PD-1000. The PD-1500 is equipped with four mass flow controllers for matchless gas control.

PD-Pro Plasma Treatment System: The PD-Pro system provides a large plasma processing cavity for the treatment of large substrates or multiple smaller substrates. Similar to the award-winning ProVIA™ Plasma Treatment System, the PD-Pro offers market-leading plasma uniformity by using a single-step process. The PD-Pro, which is a self-contained system, comes with a space-saving and compact chassis including an easy-access, front-load door and accommodates the control electronics, plasma chamber, 13.56 MHz power supply, and vacuum system. The significantly improved process cycle times and rapid vacuum pump down further enhance the throughput and productivity of the system. The PD-Pro system is available in the standard type and is includes four mass flow controllers for matchless gas control and up to 13 vertical substrate processing cells.

The PD-Pro system offers exclusive vacuum and gas flow technology, innovative electrode designs, and excellent temperature management through comprehensive research and development. The careful balance of the process recipe parameters and critical design elements offers a system with the potential to create the most uniform treatment for important applications.

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