AFM Probe for Electrical and Conductive Imaging

NuNano’s Spark range of probes includes conductive silicon tapping mode probes, which are completely platinum-coated, even at the tip. These probes are used for electrical and conductive application imaging.

The Spark probes are available in two frequencies—Spark 70 Pt and Spark 350 Pt—with typical tip sharpness or with a high aspect ratio tip (represented by HAR suffix on model number).

SPARK 70 Pt Probe Model

The Spark 70 Pt from Nu Nano is a conductive AFM probe for performing electrical characterization in both contact mode and AC modes (non-contact/soft-tapping). This model exhibits excellent tip sharpness and dimensional tolerances, typical of all Nu Nano AFM probes.

Applications

The Spark 70 Pt probe can be used for electrical AFM measurements in contact mode, including conductive AFM (CAFM) and piezoresponse microscopy (PFM), as well as in AC mode, for scanning Kelvin probe microscopy (SKPM), electrostatic force microscopy (EFM), scanning impedance microscopy (SIM), etc.

Cantilever Specifications

Parameter Nominal Range
Spring constant (N/m) 2 0.5 – 3.5
Resonant frequency (kHz) 70 45 – 80
Shape Rectangular
Length (μm) 225 223 – 227
Width (μm) 30 29 – 31
Thickness (μm) 2.5 2.0 – 3.0
Material Silicon (n-type, antimony)
Resistivity (Ωcm) 0.02 0.015 – 0.025

 

afm probe imaging

Tip Specifications

Parameter Nominal Range
Radius (nm) 18 < 30
Height (μm) 6 5 – 8
Set back (μm) 7.5 6.5 – 8.5
Shape Conical
Cone angle (°) 25 15 - 40
Material Silicon (n-type, antimony)
Resistivity (Ωcm) 0.02 0.015 – 0.025

 

Coatings

. .
Frontside / Tip 5 nm Ti
40 nm Pt
Backside / Reflective 5 nm Ti
40 nm Pt

 

Chip Specifications

. .
Length (mm) 3.4
Width (mm) 1.6
Thickness (mm) 0.3
Cantilever anchor Yes
Alignment grooves No

 

SPARK 350 Pt Probe Model

NuNano’s Spark 350 Pt is a conductive AFM probe for electrical characterization in AC modes (noncontact/tapping).

Applications

The Spark 350 Pt probe can be used for performing electrical AFM measurements using AC modes, such as electrostatic force microscopy (EFM), scanning impedance microscopy (SIM), scanning Kelvin probe microscopy (SKPM), etc.

Cantilever Specifications

Parameter Nominal Range
Spring constant (N/m) 42 25 - 70
Resonant frequency (kHz) 350 300 - 400
Shape Rectangular
Length (μm) 125 123 - 127
Width (μm) 30 29 – 31
Thickness (μm) 4.5 4.0 – 5.0
Material Silicon (n-type, antimony)
Resistivity (Ωcm) 0.02 0.015 – 0.025

 

NB. Nominal values for spring constants and resonant frequencies are measured using well-known methods and based on expected probe dimensions. Ranges are calculated using measured dimensional forms.

Tip Specifications

Parameter Nominal Range
Radius (nm) 18 < 30
Height (μm) 6 5 – 8
Set back (μm) 7.5 6.5 – 8.5
Shape Conical
Cone angle (°) 25 15 - 40
Material Silicon (n-type, antimony)
Resistivity (Ωcm) 0.02 0.015 – 0.025

 

Coatings

. .
Frontside / Tip 5 nm Ti
40 nm Pt
Backside / Reflective 5 nm Ti
40 nm Pt

 

Chip Specifications

. .
Length (mm) 3.4
Width (mm) 1.6
Thickness (mm) 0.3
Cantilever anchor Yes
Alignment grooves No

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