Park NX-Hivac: High Vacuum AFM System

Park NX-Hivac enables failure analysis engineers to enhance the sensitivity and repeatability​ of their ​AFM ​measurements through a high vacuum ​environment.

Users can measure a wide range of signal responses in various failure analysis applications, such as dopant concentration of Scanning Spreading Resistance Microscopy (SSRM), since high vacuum measurement offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions.

Park NX-Hivac facilitates materials science research that requires extremely accurate and precise measurements in an atmosphere devoid of oxygen and other contaminants.

Park NX-Hivac - High vacuum atomic force microscope (AFM) for failure analysis

Video Credit: Park Systems

Scanning Spreading Resistance Microscopy (SSRM) measurements can substantially decrease damage to the sample and the tip by lowering the necessary tip-sample interaction force. Enhancing the spatial resolution and signal-to-noise ratio will increase the lifespan of each tip, making scanning more affordable and practical while also increasing the accuracy of the findings.

This makes high vacuum Scanning Spreading Resistance Microscopy (SSRM) measurements conducted with the NX-Hivac an excellent choice for failure analysis engineers looking to increase their throughput, reduce costs, and improve accuracy.

Park NX-Hivac: High Vacuum AFM System

Image Credit: Park Systems

Park Hivac Manager

NX-Hivac Auto Vacuum Control

Hivac Manager regulates the high vacuum and, at the click of a button, rationally and graphically controls the venting procedures and pumping to ensure the optimum vacuum condition. Users do not have to worry about the vacuum operation’s sequence after clicking a button since each procedure is monitored by color and schematic changes. Vacuum control software allows users to achieve better productivity and easier AFM operation.

Park NX-Hivac: High Vacuum AFM System

Image Credit: Park Systems

Advanced Automation Features

A variety of tools are available in the NX-Hivac to reduce the amount of human input needed. As a result, users can scan more quickly and boost lab output.

StepScan Automation with Motorized stage

Park NX-Hivac: High Vacuum AFM System

Image Credit: Park Systems

StepScan enables users to rapidly configure the scanner to image various zones. Users can scan a sample with the NX-Hivac in just five steps: Lift the cantilever, move the motorized stage to a user-defined coordinate, scan again, and repeat. This significantly increases productivity and substantially lowers the amount of user input that is necessary.

Motorized Laser Alignment

Park NX-Hivac: High Vacuum AFM System

Image Credit: Park Systems

Using Park’s motorized laser beam alignment, automated measuring processes can be carried out without any input from the user. With the advanced pre-aligned cantilever holder, the laser beam is focused on the cantilever upon tip exchange. The laser point is then adjusted using motorized positioning knobs along the X and Y axis.

Increasing Accuracy and Productivity

The NX-Hivac is the most precise high-performance AFM in the world and one of the most practical and effective AFMs for failure analysis applications. Users can work more productively with Park NX-Hivac and ensure reliable results.

Closed-Loop XY and Z Scanners

With two independent closed-loop XY and Z flexure scanners for the sample and probe tip, users can rest assured that their scans will be extremely accurate. The NX-Hivac delivers minimal residual bow, flat and orthogonal XY scanning with an out-of-plane motion of less than 1 nm over the whole scan range.

A high-speed Z scanner with a 15 μm scan range and less than 0.5% non-linearity is another characteristic of the NX-Hivac. As a result, precise 2D and 3D measurements can be obtained without the need for software processing.

Low Noise XYZ Position Sensors

The NX-Hivac features Park AFM’s industry-leading low-noise Z detector that can accurately measure sample topography, while the low-noise XY closed loop scan minimizes the forward and backward scan gap to less than 0.15% of the scan range.

Park NX-Hivac: High Vacuum AFM System

Image Credit: Park Systems

24-Bit Digital Electronics

Users can reduce the amount of time wasted and maximize accuracy with the trademark NX Series electronics controller that is featured in the NX-Hivac. The controller is an all-digital, 24-bit high-speed device, allowing the user to carry out a variety of scans, including with the True Non-Contact mode.

The controller is perfect for precise voltage and current monitoring as well as nanoscale imaging due to its low-noise design and high-speed processing unit. Digital signal processing is another element of embedded electronics that enables simple measurement and image analysis.

Park NX-Hivac: High Vacuum AFM System

Image Credit: Park Systems

Park NX-Hivac Specifications

Source: Park Systems

. . .
Scanner Z Scanner

Guided high-force flexure scanner

Scan range: 15 µm
Height noise level: 30 pm (RMS, at 0.5 kHz bandwidth)
XY Scanner

Single module flexure XY-scanner with dual servo closed-loop control

Scan range: 100 µm × 100 µm (optional 50 µm × 50 µm)
Stage Z stage range: 24 mm (Motorized)
Focus travel range: 11 mm (Motorized)
XY stage travel range : 22 mm x 22 mm (Motorized)
Sample Mount Sample size:  Open space up to 50 mm x 50 mm, thickness up to 20 mm
Sample weight: < 500 g
Optics 10x (0.23 NA) ultra-long working distance lens (1 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 840 × 630 µm (with 10× objective lens)
CCD: 5 M pixel
Physical Information Inner vacuum chamber: 300 mm x 420 mm x 320 mm
Outer vacuum (including granite & pump): 800 mm x 950 mm x 1240 mm
High Vacuum Vacuum level: Typically less than 1 x 10-5 torr
Pumping speed: Reach 10-5 torr within 5 min.
Software SmartScan™

Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)


AFM data analysis software

Hivac Manager

Auto vacuum control software
Electronics Integrated functions
4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method, optional)
Digital Q control

External signal access
20 embedded signal input/output ports
5 TTL outputs: EOF, EOL, EOP, Modulation, and AC bias
AFM Modes
(*Optionally available)
Standard Imaging

True Non-Contact AFM
PinPoint™ AFM
Basic Contact AFM
Lateral Force
Microscopy (LFM)
Phase Imaging
Tapping AFM
Force Measurement

Force Distance (F/d) Spectroscopy
Force Volume Imaging
Dielectric/Piezoelectric Properties

Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage*
Mechanical Properties

Force Modulation Microscopy (FMM)
Nanolithography with High Voltage*
Magnetic Properties*

Magnetic Force Microscopy (MFM)
Tunable Magnetic Field MFM

Electrical Properties

Conductive AFM (C-AFM)*
IV Spectroscopy*
Kelvin Probe Force Microscopy (KPFM)
Scanning Capacitance Microscopy (SCM)*
Scanning Spreading-Resistance Microscopy (SSRM)*
Scanning Tunneling Microscopy (STM)*
Photo Current Mapping (PCM)*

Chemical Properties*

Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)


Park NX-Hivac: High Vacuum AFM System

Image Credit: Park Systems

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