Park SmartLitho™: Operating Software for Nanolithography

SmartScan™ Auto from Park Systems performs all the essential imaging operations and independently decides on the best image quality and scan speed. SmartScan Auto is made feasible by Park’s proprietary enabling technologies to helps users save money and time and improve results.

It is the most seamless operating software available for nanolithography and nanomanipulation.

Park SmartLitho, facilitated by SmartScan, is an atomic force microscopy (AFM)-based platform that conducts nanomanipulation and nanolithography on materials, nanotechnology, electrical and electronic devices, and other areas of research.

Vector and Raster mode are supported by the Park SmartLitho software, as it has a range of lithography modes. It also functions on the SmartScan platform, consisting of a simple user interface, and offers an autonomous convenient drawing editor.

Park SmartLitho™ Provides a Stand-Alone Convenient Drawing Editor

Christmas Ball Lithography on Si.

Christmas Ball Lithography on Si.

Christmas Ball Lithography on Si. Image Credit: Park Systems

SmartLitho Mode Supported by Park SmartScan™

Christmas Ball Lithography on Si.

Christmas Ball Lithography on Si.

Taegeuk Mark Lithography on PZT. Image Credit: Park Systems

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